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Volumn 13, Issue 3, 2010, Pages 235-248

Young's modulus measurement of thin films by resonant frequency method using magnetostrictive resonator

Author keywords

Magnetostrictvie resonator; Resonant frequency method; Young's modulus of thin film

Indexed keywords

ASSESSING METHOD; BEFORE AND AFTER; EXTERNAL MAGNETIC FIELD; FIRST-ORDER; LAMINATED PLATE THEORY; NON DESTRUCTIVE; RESONANT FREQUENCIES; RESONANT FREQUENCY SHIFT; SIC MATERIALS; STANDARD MEASUREMENTS; YOUNG'S MODULUS; YOUNG'S MODULUS OF THIN FILM;

EID: 77951440092     PISSN: 15462218     EISSN: 15462226     Source Type: Journal    
DOI: None     Document Type: Article
Times cited : (2)

References (43)
  • 1
    • 5544274244 scopus 로고
    • Microfabricated structures for the in situ measurement of residual-stress, Young's modulus, and ultimate strain of thin films
    • Allen, M. G.; Mehregany, M.; Howe, R. T.; Senturia, S. D. (1987): Microfabricated structures for the in situ measurement of residual-stress, Young's modulus, and ultimate strain of thin films. Applied Physics Letters, vol.51, pp. 241-243.
    • (1987) Applied Physics Letters , vol.51 , pp. 241-243
    • Allen, M.G.1    Mehregany, M.2    Howe, R.T.3    Senturia, S.D.4
  • 2
    • 34250199388 scopus 로고    scopus 로고
    • On the modelling of rate-dependent domain switching in piezoelectric materials under superimposed stresses
    • Arockiarajan, A.; Menzel, A. (2007): On the Modelling of Rate-Dependent Domain Switching in Piezoelectric Materials under Superimposed Stresses, CMESComputer Modeling in Engineering & Sciences, vol.19, pp. 163-178.
    • (2007) CMESComputer Modeling in Engineering & Sciences , vol.19 , pp. 163-178
    • Arockiarajan, A.1    Menzel, A.2
  • 3
    • 0032500424 scopus 로고    scopus 로고
    • Size effects in materials due to microstructural and dimensional constraints: A comparative review
    • Arzt, E. (1998): Size effects in materials due to microstructural and dimensional constraints: a comparative review. Acta Materialia, vol.46, pp. 5611-5626.
    • (1998) Acta Materialia , vol.46 , pp. 5611-5626
    • Arzt, E.1
  • 4
    • 10044243645 scopus 로고    scopus 로고
    • Evaluation of Young modulus of CVD coatings by different techniques
    • Bellan, C.; Dhers, J. (2004): Evaluation of Young modulus of CVD coatings by different techniques. Thin Solid Films, Vol.469-470, pp. 214-220.
    • (2004) Thin Solid Films , vol.469-470 , pp. 214-220
    • Bellan, C.1    Dhers, J.2
  • 5
    • 67649960490 scopus 로고    scopus 로고
    • Regularized meshless method for antiplane piezoelectricity problems with multiple inclusions
    • Chen, K. H.; Kao, J. H.; Chen, J. T. (2009): Regularized meshless method for antiplane piezoelectricity problems with multiple inclusions, CMC: Computers, Materials, & Continua, vol.9, pp. 253-280.
    • (2009) CMC: Computers, Materials, & Continua , vol.9 , pp. 253-280
    • Chen, K.H.1    Kao, J.H.2    Chen, J.T.3
  • 6
    • 0029508857 scopus 로고
    • Effect of Ar gas pressure on growth, structure, and mechanical properties of sputtered Ti, Al, TiAl, and Ti3Al films
    • Chinmulgund, M.; Inturi, R. B.; Barnard, J. A. (1995): Effect of Ar gas pressure on growth, structure, and mechanical properties of sputtered Ti, Al, TiAl, and Ti3Al films. Thin Solid Films, vol.270, pp. 260-263.
    • (1995) Thin Solid Films , vol.270 , pp. 260-263
    • Chinmulgund, M.1    Inturi, R.B.2    Barnard, J.A.3
  • 7
    • 0031078638 scopus 로고    scopus 로고
    • Characterization of the elastic properties of amorphous silicon carbide thin films by acoustic microscopy
    • Cros, B.; Gat, E.; Saurel, J. M. (1997): Characterization of the elastic properties of amorphous silicon carbide thin films by acoustic microscopy. Journal of Non-Crystalline Solids, vol.209, pp. 273-282.
    • (1997) Journal of Non-Crystalline Solids , vol.209 , pp. 273-282
    • Cros, B.1    Gat, E.2    Saurel, J.M.3
  • 9
    • 77449109459 scopus 로고    scopus 로고
    • Influence of temperature and high electric field on power consumption by piezoelectric actuated integrated structure
    • Deepak, A. A.; Ranjan, G. (2009): Influence of Temperature and High Electric Field on Power Consumption by Piezoelectric Actuated Integrated Structure, CMC: Computers, Materials, & Continua, vol.10, pp. 139-162.
    • (2009) CMC: Computers, Materials, & Continua , vol.10 , pp. 139-162
    • Deepak, A.A.1    Ranjan, G.2
  • 11
    • 77449150905 scopus 로고    scopus 로고
    • Comparison of new formulations for martensite start temperature of Fe-Mn-Si shape memory alloys using geneting programming and neural networks
    • Erdogan, K.; Murat E. (2009): Comparison of New Formulations for Martensite Start Temperature of Fe-Mn-Si Shape Memory Alloys Using Geneting Programming and Neural Networks, CMC: Computers, Materials, & Continua, vol.10, pp. 65-96.
    • (2009) CMC: Computers, Materials, & Continua , vol.10 , pp. 65-96
    • Erdogan, K.1    Murat, E.2
  • 12
    • 0037210072 scopus 로고    scopus 로고
    • A methodology for determining mechanical properties of freestanding thin films and MEMS materials
    • Espinosa, H. D.; Prorok, B. C.; Fischer, M. (2003): A methodology for determining mechanical properties of freestanding thin films and MEMS materials. Journal of the Mechanics and Physics of Solids, Vol.51, pp. 47-67.
    • (2003) Journal of the Mechanics and Physics of Solids , vol.51 , pp. 47-67
    • Espinosa, H.D.1    Prorok, B.C.2    Fischer, M.3
  • 13
    • 1642346476 scopus 로고    scopus 로고
    • Plasticity size effects in freestanding submicron polycrystalline FCC films subjected to puretension
    • Espinosa, H. D.; Prorok, B. C.; Peng, B. (2004): Plasticity size effects in freestanding submicron polycrystalline FCC films subjected to puretension. Journal of the Mechanics and Physics of Solids, vol.52, pp. 667-689.
    • (2004) Journal of the Mechanics and Physics of Solids , vol.52 , pp. 667-689
    • Espinosa, H.D.1    Prorok, B.C.2    Peng, B.3
  • 14
    • 9944226778 scopus 로고    scopus 로고
    • Role of coupling terms in constitutive relationships of magnetostrictive materials
    • Ghosh, D. P.; Gopalakrishnan, S. (2004): Role of Coupling Terms in Constitutive Relationships of Magnetostrictive Materials, CMC: Computers, Materials, & Continua, vol.1, pp. 213-228.
    • (2004) CMC: Computers, Materials, & Continua , vol.1 , pp. 213-228
    • Ghosh, D.P.1    Gopalakrishnan, S.2
  • 15
    • 0002193058 scopus 로고    scopus 로고
    • Mechanical characterization of thick polysilicon films: Young's modulus and fracture strength evaluated with microstructures
    • Greek, S.; Ericson, F.; Johansson, S.; Furtsch, M.; Rump, A. (1999): Mechanical characterization of thick polysilicon films: Young's modulus and fracture strength evaluated with microstructures. Journal of Micromechanics and Microengineering, vol.9, pp. 245-251.
    • (1999) Journal of Micromechanics and Microengineering , vol.9 , pp. 245-251
    • Greek, S.1    Ericson, F.2    Johansson, S.3    Furtsch, M.4    Rump, A.5
  • 16
    • 0036887933 scopus 로고    scopus 로고
    • Mechanical behavior of 30-50 mn thick aluminum films under uniaxial tension
    • Haque, M. A.; Saif, M. T. A. (2002): Mechanical behavior of 30-50 mn thick aluminum films under uniaxial tension. Scripta Materialia. vol.47, pp. 863-867.
    • (2002) Scripta Materialia , vol.47 , pp. 863-867
    • Haque, M.A.1    Saif, M.T.A.2
  • 17
    • 0034226704 scopus 로고    scopus 로고
    • Tensile testing of free-standing Cu, Ag and Al thin films and Ag/Cu multilayers
    • Huang, H.; Spaepen, F. (2000): Tensile testing of free-standing Cu, Ag and Al thin films and Ag/Cu multilayers. Acta Materialia, vol.48, pp. 3261-3269.
    • (2000) Acta Materialia , vol.48 , pp. 3261-3269
    • Huang, H.1    Spaepen, F.2
  • 18
    • 0026976496 scopus 로고
    • Determination of Young's moduli of micromechanical thin films using the resonance method
    • Kiesewetter, L.; Zhang, J. M.; Houdeau, D.; Steckenborn, A. (1992): Determination of Young's moduli of micromechanical thin films using the resonance method. Sensors and Actuators A: Physical, vol.35, pp. 153-159.
    • (1992) Sensors and Actuators A: Physical , vol.35 , pp. 153-159
    • Kiesewetter, L.1    Zhang, J.M.2    Houdeau, D.3    Steckenborn, A.4
  • 19
    • 34248999480 scopus 로고    scopus 로고
    • Measuring the thin film elastic modulus with a magnetostrictive sensor
    • Liang, C.; Prorok, B. C. (2007): Measuring the thin film elastic modulus with a magnetostrictive sensor. Journal of Micromechanics and Microengineering, vol.17, pp. 709-716.
    • (2007) Journal of Micromechanics and Microengineering , vol.17 , pp. 709-716
    • Liang, C.1    Prorok, B.C.2
  • 20
    • 0036498645 scopus 로고    scopus 로고
    • Size-dependent elastic modulus of Cu and Au thin films
    • Liang, L. H.; Li, J. C.; Jiang, Q. (2002): Size-dependent elastic modulus of Cu and Au thin films. Solid State Communications, vol.121, pp. 453-455.
    • (2002) Solid State Communications , vol.121 , pp. 453-455
    • Liang, L.H.1    Li, J.C.2    Jiang, Q.3
  • 21
    • 23444456629 scopus 로고    scopus 로고
    • A nonlinear constitutive model for magnetostrictive materials
    • Liu, X. E.; Zheng, X. J. (2005): A nonlinear constitutive model for magnetostrictive materials. Acta Mechanica Sinica, vol.21, pp. 278-285.
    • (2005) Acta Mechanica Sinica , vol.21 , pp. 278-285
    • Liu, X.E.1    Zheng, X.J.2
  • 22
    • 0031553478 scopus 로고    scopus 로고
    • Determination of Young's modulus by a resonant technique applied to two dynamically ion mixed thin films
    • Peraud, S.; Pautrot, S.; Villechaise, P.; Mazot, P.; Mendez, J. (1997): Determination of Young's modulus by a resonant technique applied to two dynamically ion mixed thin films. Thin Solid Films, vol.292, pp. 55-60.
    • (1997) Thin Solid Films , vol.292 , pp. 55-60
    • Peraud, S.1    Pautrot, S.2    Villechaise, P.3    Mazot, P.4    Mendez, J.5
  • 23
    • 0018541427 scopus 로고
    • Young's modulus measurements of thin films using micromechanics
    • Petersen, K. E.; Guarnieri, C. R. (1979): Young's modulus measurements of thin films using micromechanics. Journal of Applied Physics, Vol.50, pp. 6761-6764.
    • (1979) Journal of Applied Physics , vol.50 , pp. 6761-6764
    • Petersen, K.E.1    Guarnieri, C.R.2
  • 24
    • 0345733333 scopus 로고    scopus 로고
    • Effects of nanometer-thick passivation layers on the mechanical response of thin gold films
    • Prorok, B. C.; Espinosa, H. D. (2002): Effects of nanometer-thick passivation layers on the mechanical response of thin gold films. Journal of Nanoscience and Nanotechnology, vol:2, pp. 427-433.
    • (2002) Journal of Nanoscience and Nanotechnology , vol.2 , pp. 427-433
    • Prorok, B.C.1    Espinosa, H.D.2
  • 25
    • 0035923234 scopus 로고    scopus 로고
    • Characterization of nano-dimensional thinfilm elastic moduli using magnetoelastic sensors
    • Schmidt, S.; Grimes, C. A. (2001): Characterization of nano-dimensional thinfilm elastic moduli using magnetoelastic sensors. Sensors and Actuators A: Physical, vol:94, pp. 189-196.
    • (2001) Sensors and Actuators A: Physical , vol.94 , pp. 189-196
    • Schmidt, S.1    Grimes, C.A.2
  • 26
    • 0035386584 scopus 로고    scopus 로고
    • Elastic modulus measurement of thin films coated onto magnetoelastic ribbons
    • Schmidt, S.; Grimes, C. A. (2001): Elastic modulus measurement of thin films coated onto magnetoelastic ribbons. IEEE Transactions on Magnetics, vol.37, pp. 2731-2733.
    • (2001) IEEE Transactions on Magnetics , vol.37 , pp. 2731-2733
    • Schmidt, S.1    Grimes, C.A.2
  • 27
    • 0032158229 scopus 로고    scopus 로고
    • A microbend test method for measuring the plasticity length scale
    • Stolken, J. S.; Evans, A. G. (1998): A microbend test method for measuring the plasticity length scale. Acta Materialia, vol.46, pp. 5109-5115.
    • (1998) Acta Materialia , vol.46 , pp. 5109-5115
    • Stolken, J.S.1    Evans, A.G.2
  • 28
    • 0030398014 scopus 로고    scopus 로고
    • Non-destructive characterization and evaluation of thin films by laser-induced ultrasonic surface waves
    • Schneider, D.; Tucker, M. D. (1996): Non-destructive characterization and evaluation of thin films by laser-induced ultrasonic surface waves. Thin Solid Films, vol.290-291, pp. 305-311.
    • (1996) Thin Solid Films , vol.290-291 , pp. 305-311
    • Schneider, D.1    Tucker, M.D.2
  • 30
    • 0033897055 scopus 로고    scopus 로고
    • Material issues in microelectromechanical systems (MEMS)
    • Spearing, S. M. (2000): Material issues in microelectromechanical systems (MEMS). Acta Materialia, vol.48, pp. 179-196.
    • (2000) Acta Materialia , vol.48 , pp. 179-196
    • Spearing, S.M.1
  • 31
    • 0032026436 scopus 로고    scopus 로고
    • Specimen size effect of tensile strength of surface-micromachined polycrystalline silicon thin films
    • Tsuchiya, T.; Tabata, O.; Sakata, J.; Taga, Y. (1998): Specimen size effect of tensile strength of surface-micromachined polycrystalline silicon thin films. Journal of Microelectromechanical Systems, vol.7, pp. 106-113.
    • (1998) Journal of Microelectromechanical Systems , vol.7 , pp. 106-113
    • Tsuchiya, T.1    Tabata, O.2    Sakata, J.3    Taga, Y.4
  • 32
    • 0038790007 scopus 로고    scopus 로고
    • MEMS reliability from a failure mechanisms perspective
    • Van, Spengen. W. M. (2003): MEMS reliability from a failure mechanisms perspective. Microelectronics Reliability, vol.43, pp. 1049-1060.
    • (2003) Microelectronics Reliability , vol.43 , pp. 1049-1060
    • Van Spengen., W.M.1
  • 33
    • 58149380326 scopus 로고    scopus 로고
    • A review on the three-dimensional analytical approaches of multilayered and functionally graded piezoelectric plates and shells
    • Wu, C. P.; Chiu, K. H.;Wang Y. M. (2008): A Review on the Three-Dimensional Analytical Approaches of Multilayered and Functionally Graded Piezoelectric Plates and Shells, CMC: Computers, Materials, & Continua, vol.8, pp. 93-132.
    • (2008) CMC: Computers, Materials, & Continua , vol.8 , pp. 93-132
    • Wu, C.P.1    Chiu, K.H.2    Wang, Y.M.3
  • 34
    • 35349016416 scopus 로고    scopus 로고
    • A State space approach for the analysis of doubly curved functionally graded elastic and piezoelectric shells
    • Wu, C. P.; Liu K. Y. (2007): A State Space Approach for the Analysis of Doubly Curved Functionally Graded Elastic and Piezoelectric Shells, CMC: Computers, Materials, & Continua, vol.6, pp. 177-200.
    • (2007) CMC: Computers, Materials, & Continua , vol.6 , pp. 177-200
    • Wu, C.P.1    Liu, K.Y.2
  • 35
    • 0026960770 scopus 로고
    • New bulge test technique for the determination of Young's modulus and Poisson's ratio of thin films
    • Vlassak, J. J.; Nix, W. D. (1992): New bulge test technique for the determination of Young's modulus and Poisson's ratio of thin films. Journal of Materials Research, vol.7, pp. 3242-3249.
    • (1992) Journal of Materials Research , vol.7 , pp. 3242-3249
    • Vlassak, J.J.1    Nix, W.D.2
  • 37
    • 14244250807 scopus 로고    scopus 로고
    • Comments on determining the elastic modulus of a thin film using the micromachined free-free beam
    • Yu, C.; Hsu, C.; Fang, W. (2005): Comments on determining the elastic modulus of a thin film using the micromachined free-free beam. Journal of Micromechanics and Microengineering, vol.15, pp. 351-357.
    • (2005) Journal of Micromechanics and Microengineering , vol.15 , pp. 351-357
    • Yu, C.1    Hsu, C.2    Fang, W.3
  • 38
    • 20444501334 scopus 로고    scopus 로고
    • A nonlinear constitutive model for Terfenol-d rods
    • Zheng, X. J.; Liu, X. E. (2005): A nonlinear constitutive model for Terfenol-d rods. Journal of Applied Physics, vol.97, pp. 053901.
    • (2005) Journal of Applied Physics , vol.97 , pp. 053901
    • Zheng, X.J.1    Liu, X.E.2
  • 39
    • 33947698433 scopus 로고    scopus 로고
    • Vibration suppression of laminated composite beams using actuators of giant magnetostrictive materials
    • Zhou, H. M.; Zhou, Y. H. (2007): Vibration suppression of laminated composite beams using actuators of giant magnetostrictive materials. Smart Materials & Structures, vol.16, pp. 198-206.
    • (2007) Smart Materials & Structures , vol.16 , pp. 198-206
    • Zhou, H.M.1    Zhou, Y.H.2
  • 40
    • 33646874147 scopus 로고    scopus 로고
    • Vibration active control of nonlinear giant magnetostrictive actuators
    • Zhou, H. M.; Zheng, X. J.; Zhou, Y. H. (2006): Vibration active control of nonlinear giant magnetostrictive actuators. Smart Materials & Structures, vol.15, pp. 792-798.
    • (2006) Smart Materials & Structures , vol.15 , pp. 792-798
    • Zhou, H.M.1    Zheng, X.J.2    Zhou, Y.H.3
  • 41
    • 35348934404 scopus 로고    scopus 로고
    • Numerical simulation of nonlinear dynamic responses of beams laminated with giant magnetostrictive actuators
    • Zhou, H. M.; Zhou, Y. H.; Zheng, X. J. (2007): Numerical simulation of nonlinear dynamic responses of beams laminated with giant magnetostrictive actuators. CMC: Computers, Materials, & Continua, vol.6, pp. 201-211.
    • (2007) CMC: Computers, Materials, & Continua , vol.6 , pp. 201-211
    • Zhou, H.M.1    Zhou, Y.H.2    Zheng, X.J.3
  • 42
    • 77449111633 scopus 로고    scopus 로고
    • A general magnetoelastic coupling theory of deformable magnetized medium including magnetic forces and magnetostriction effects
    • Zhou, H. M.; Zhou, Y. H.; Zheng, X. J.;Wei, J. (2009): A general magnetoelastic coupling theory of deformable magnetized medium including magnetic forces and magnetostriction effects, CMC: Computers, Materials, & Continua, 12(3): 237-249.
    • (2009) CMC: Computers, Materials, & Continua , vol.12 , Issue.3 , pp. 237-249
    • Zhou, H.M.1    Zhou, Y.H.2    Zheng, X.J.3    Wei, J.4
  • 43
    • 33644928763 scopus 로고    scopus 로고
    • The evaluation of Young's modulus and residual stress of copper films by microbridge testing
    • Zhou, Z. M.; Zhou, Y.; Yang, C. S.; Chen, J. A.; Ding, W.; Ding, G. F. (2006): The evaluation of Young's modulus and residual stress of copper films by microbridge testing. Sensors and Actuators A: Physical, vol.127, pp. 392-397
    • (2006) Sensors and Actuators A: Physical , vol.127 , pp. 392-397
    • Zhou, Z.M.1    Zhou, Y.2    Yang, C.S.3    Chen, J.A.4    Ding, W.5    Ding, G.F.6


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