Surface mound formation during epitaxial growth of CrN(001)

Thin Solid Films

Volumn 518, Issue 14, 2010, Pages 3813-3818

  Zhang, X Y ^a   Gall, D ^a  

^a RENSSELAER POLYTECHNIC INSTITUTE   (United States)

Author keywords

Chromium nitride; Hard coating; Scanning tunneling microscopy; Surface morphology

Indexed keywords

CHROMIUM NITRIDE; COHERENCE LENGTHS; IN-SITU SCANNING TUNNELING MICROSCOPIES; LONG CHAINS; REACTIVE MAGNETRON SPUTTERING; ROOT MEAN SQUARE; SQUARE SHAPE; STEP EDGE;

CHROMIUM; COALESCENCE; DENDRIMERS; HARD COATINGS; MONOLAYERS; MORPHOLOGY; NITRIDES; SCANNING; SCANNING TUNNELING MICROSCOPY; SINGLE CRYSTALS; SOIL CONSERVATION; SURFACE ROUGHNESS; WIND TUNNELS;

SURFACE MORPHOLOGY;

EID: 77950531908     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2009.12.085     Document Type: Article

References (52)

1. Panjan P., Navinsek B., Cvelbar A., Zalar A., and Milosev I. Thin Solid Films 282 (1996) 298
2. Hones P., Zakri C., Schmid P.E., Lévy F., and Shojaei O.R. Appl. Phys. Lett. 76 (2000) 3194
3. Milosev I., Abels J.M., Strehblow H.-H., Navinsek B., and Metikos-Hukovic M. J. Vac. Sci. Technol. A 14 (1996) 2527
4. Stockemer J., Winand R., and Brande P.V. Surf. Coat. Technol. 115 (1999) 230
5. Constable C.P., Yarwood J., Hovsepian P., Donohue L.A., Lewis D.B., and Münz W.-D. J. Vac. Sci. Technol. A 18 (2000) 1681
6. Cunha L., Andritschky M., Rebouta L., and Pischow K. Surf. Coat. Technol. 116 (1999) 1152
7. Fayer A., Glozman O., and Hoffman A. Appl. Phys. Lett. 67 (1995) 2299
8. Carcia P.F., French R.H., Reilly M.H., Lemon M.F., and Jones D.J. Appl. Phys. Lett. 70 (1997) 2371
9. Tsuboi S., Kotsuji S., Yoshihara T., and Suzuki K. J. Vac. Sci. Technol. B 15 (1997) 2228
10. Mulligan C.P., and Gall D. Surf. Coat. Technol. 200 (2005) 1495
11. Mulligan C.P., Blanchet T.A., and Gall D. Surf. Coat. Technol. 203 (2008) 584
12. Mulligan C.P., Blanchet T.A., and Gall D. Surf. Coat. Technol. 204 (2010) 1388
13. Quintela C.X., Rivadulla F., and Rivas J. Appl. Phys. Lett. 94 (2009) 152103
14. Gasda M.D., Eisman G.A., and Gall D. J. Electrochem. Soc. 156 (2010) B71
15. Herle P.S., Hegde M.S., Vasathacharya N.Y., Philip S., Rao M.V.R., and Sripathi T. J. Solid State Chem. 134 (1997) 120
16. Panjan P., Navisek B., Cvelbar A., Zalar A., and Vlcek J. Surf. Coat. Technol. 98 (1998) 1497
17. Shih K.K., Dove D.B., and Crowe J.R. J. Vac. Sci. Technol. A 4 (1986) 564
18. Cekada M., Panjan P., Navinsek B., and Cvelbar F. Vacuum 52 (1999) 461
19. Mientus R., and Ellmer K. Surf. Coat. Technol. 116-119 (1999) 1093
20. Gall D., Shin C.-S., Haasch R.T., Petrov I., and Greene J.E. J. Appl. Phys. 91 (2002) 5882
21. Browne J.D., Liddell P.R., Street R., and Millis T. Phys. Status Solidi 1 (1970) 715
22. Tsuchiya Y., Kosuge K., Ikeda Y., Shigematsu T., Yamaguchi S., and Nakayama N. Mater. Trans., JIM 37 (1996) 121
23. Corliss L.M., Elliott N., and Hastings J.M. Phys. Rev. 117 (1960) 929
24. Eddine M.N., Sayetat F., and Bertaut E.F. C. R. Seances Acad. Sci., Ser. B 269 (1969) 574
25. Filippetti A., Picket W.E., and Klein B.M. Phys. Rev. B 59 (1999) 7043
26. Constantin C., Haider M.B., Ingram D., and Smith A.R. Appl. Phys. Lett. 85 (2004) 6371
27. Herwadkar A., and Lambrecht W.R.L. Phys. Rev. B 79 (2009) 035125
28. Zou C.W., Wang H.J., Li M., Liu C.S., Guo L.P., and Fu D.J. Vacuum 83 (2009) 1086
29. Gall D., Shin C.-S., Spila T., Odén M., Senna M.J.H., Greene J.E., and Petrov I. J. Appl. Phys. 91 (2002) 3589
30. Xu J.H., Umehara H., and Kojima I. Appl. Surf. Sci. 201 (2002) 208
31. Frederick J.R., D'Arcy-Gall J., and Gall D. Thin Solid Films 494 (2006) 330
32. Frederick J.R., and Gall D. Appl. Phys. Lett. 87 (2005) 053107
33. Frederick J.R., and Gall D. J. Appl. Phys. 98 (2005) 054906
34. Svedberg E.B., Sandström P., Sundgren J.-E., Greene J.E., and Madsen L.D. Surf. Sci. 429 (1999) 206
35. Wall M.A., Cahill D.G., Petrov I., Gall D., and Greene J.E. Phys. Rev. B 70 (2004) 035413
36. S. Kodambaka, V. Petrova, A. Vailionis, P. Desjardins, D.G. Cahill, I. Petrov, J.E. Greene, Thin Solid Films 392 (2001) 164.
37. Wall M.A., Cahill D.G., Petrov I., Gall D., and Greene J.E. Surf. Sci. 581 (2005) L122
38. Shin C.-S., Rudenja S., Gall D., Hellgren N., Lee T.-Y., Petrov I., and Greene J.E. J. Appl. Phys. 95 (2004) 356
39. Smith A.R., Al-Brithen H.A.H., Ingram D.C., and Gall D. J. Appl. Phys. 90 (2001) 1809
40. AL-Brithen H.A.H., Trifan E.M., Ingram D.C., Smith A.R., and Gall D. J. Crystal Growth 242 (2002) 345
41. Al-Brithen H.A.H., and Smith A.R. Appl. Phys. Lett. 77 (2000) 2485
42. Gall D., Kodambaka S., Wall M.A., Petrov I., and Greene J.E. J. Appl. Phys. 93 (2003) 9086
43. Bales G.S., and Zangwill A. Phys. Rev. B 41 (1990) 5500
44. Schwoebel R.L. J. Appl. Phys. 40 (1968) 614
45. Wang S.C., and Ehrlich G. Phys. Rev. Lett. 70 (1993) 41
46. Ehrlich G. Surf. Sci. 331-333 (1995) 865
47. Maroutian T., Douillard L., and Ernst H.-J. Phys. Rev. B 64 (2001) 165401
48. Yang H.-N., Lu T.-M., and Wang G.-C. Diffraction from Rough Surfaces and Dynamics Growth Fronts (1993), World Scientific, Singapore 53
49. Yang H.-N., and Lu T.-M. Phys. Rev. B 51 (1995) 2479
50. Vanormelingen K., Degroote B., and Vantomme A. J. Vac. Sci. Technol. B 24 (2006) 725
51. Yang H.-N., Chan A., and Wang G.-C. J. Appl. Phys. 74 (1993) 101
52. Yang H.-N., Zhao Y.-P., Wang G.-C., and Lu T.-M. Phys. Rev. Lett. 76 (1996) 3774