Surface morphological evolution of epitaxial CrN(001) layers

Journal of Applied Physics

Volumn 98, Issue 5, 2005, Pages

  Frederick, J R ^a   Gall, D ^a  

^a RENSSELAER POLYTECHNIC INSTITUTE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC SHADOWING; DEPOSITION ANGLE; ROOT-MEAN-SQUARE ROUGHNESS; SMOOTH SURFACES;

EPITAXIAL GROWTH; MAGNETRON SPUTTERING; NUCLEATION; REACTION KINETICS; SINGLE CRYSTALS; SPUTTER DEPOSITION; SURFACE ROUGHNESS; SURFACES;

CHROMIUM COMPOUNDS;

EID: 25144454395     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2035307     Document Type: Article

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