Characterization of (Cr,Ta)N hard coatings reactively sputtered at low temperature

Vacuum

Volumn 52, Issue 4, 1999, Pages 461-467

  Cekada M ^a   Panjan, P ^a   Navinsek B ^a   Cvelbar, F ^b  

^a JO EF STEFAN INSTITUTE   (Slovenia)

^b UNIVERSITY OF LJUBLJANA   (Slovenia)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; ELECTRIC PROPERTIES; MECHANICAL PROPERTIES; MICROHARDNESS; NITRIDES; OXIDATION RESISTANCE; RESIDUAL STRESSES; SPUTTERING; VICKERS HARDNESS TESTING;

HARD COATINGS; VICKERS MICROINDENTATION;

PROTECTIVE COATINGS;

EID: 0033116837     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(98)00331-5     Document Type: Article

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