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Volumn 106, Issue 12, 2009, Pages

Comprehensive x-ray photoelectron spectroscopy study on compositional gradient lanthanum silicate film

Author keywords

[No Author keywords available]

Indexed keywords

ANALYTICAL MODEL; AS-DEPOSITED STATE; BINDING ENERGY SHIFTS; BRIDGING OXYGEN; COMPOSITION RATIO; COMPOSITIONAL GRADIENTS; HIGH-TEMPERATURE ANNEALING; IN-SITU; INTERFACE REACTIONS; LANTHANUM SILICATES; NON-BRIDGING OXYGEN; NON-BRIDGING OXYGEN ATOMS; OXYGEN BONDING; PT ELECTRODE; ROUGH ESTIMATION; SILICATE FILM; SILICATE LAYERS; TEMPERATURE DEPENDENCE; X-RAY PHOTOELECTRON SPECTROSCOPY STUDIES;

EID: 73849102452     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3269705     Document Type: Article
Times cited : (21)

References (24)
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    • 33747018260 scopus 로고    scopus 로고
    • 5 nm thick lanthanum oxide thin films grown on Si(100) by atomic layer deposition: The effect of post-annealing on the electrical properties
    • DOI 10.1016/j.tsf.2006.01.008, PII S0040609006000538
    • S. J. Jo, J. S. Ha, N. K. Park, D. K. Kang, and B. -H. Kim, Thin Solid Films 0040-6090 513, 253 (2006). 10.1016/j.tsf.2006.01.008 (Pubitemid 44202336)
    • (2006) Thin Solid Films , vol.513 , Issue.1-2 , pp. 253-257
    • Jo, S.J.1    Ha, J.S.2    Park, N.K.3    Kang, D.K.4    Kim, B.-H.5
  • 13
    • 33947148300 scopus 로고    scopus 로고
    • High temperature stability of lanthanum silicate dielectric on Si (001)
    • DOI 10.1063/1.2712805
    • J. S. Jur, D. J. Lichtenwalner, and A. I. Kingon, Appl. Phys. Lett. 0003-6951 90, 102908 (2007). 10.1063/1.2712805 (Pubitemid 46398457)
    • (2007) Applied Physics Letters , vol.90 , Issue.10 , pp. 102908
    • Jur, J.S.1    Lichtenwalner, D.J.2    Kingon, A.I.3
  • 19
    • 0023860656 scopus 로고
    • Oxygen bonding in nitrided sodium- and lithium-metaphosphate glasses
    • DOI 10.1016/0022-3093(88)90470-X
    • R. K. Brow, M. R. Reidmeyer, and D. E. Day, J. Non-Cryst. Solids 0022-3093 99, 178 (1988). 10.1016/0022-3093(88)90470-X (Pubitemid 18577844)
    • (1988) Journal of Non-Crystalline Solids , vol.99 , Issue.1 , pp. 178-189
    • Brow, R.K.1    Reidmeyer, M.R.2    Day, D.E.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.