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Applied Physics Letters

Volumn 90, Issue 10, 2007, Pages

High temperature stability of lanthanum silicate dielectric on Si (001)

(3) Jur, J S a Lichtenwalner, D J a Kingon, A I a

a North Carolina State University (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS DIELECTRIC PHASE; CHEMICAL COMPATIBILITY; SILICON SUBSTRATE;

CAPACITORS; CMOS INTEGRATED CIRCUITS; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; LANTHANUM COMPOUNDS; SECONDARY ION MASS SPECTROMETRY; SILICON;

THERMODYNAMIC STABILITY;

EID: 33947148300 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.2712805 Document Type: Article

Times cited : (28)

References (17)

1
- 0034739021
- A. I. Kingon, J. P. Maria, and S. K. Streiffer, Nature (London) 406, 1032 (2000).
- (2000) Nature (London) , vol.406 , pp. 1032
- Kingon, A.I.¹ Maria, J.P.² Streiffer, S.K.³

2
- 0035872897
- G. Wilk, R. M. Wallace, and J. M. Anthony, J. Appl. Phys. 89, 5243 (2001).
- (2001) J. Appl. Phys. , vol.89 , pp. 5243
- Wilk, G.¹ Wallace, R.M.² Anthony, J.M.³

3
- 0035905251
- M. Quevedo-Lopez, M. El-Bouanani, S. Addepalli, J. L. Duggan, B. E. Gnade, R. M. Wallace, M. R. Visokay, M. Douglas, and L. Colombo, Appl. Phys. Lett. 79, 4192 (2001).
- (2001) Appl. Phys. Lett. , vol.79 , pp. 4192
- Quevedo-Lopez, M.¹ El-Bouanani, M.² Addepalli, S.³ Duggan, J.L.⁴ Gnade, B.E.⁵ Wallace, R.M.⁶ Visokay, M.R.⁷ Douglas, M.⁸ Colombo, L.⁹

4
- 0036501296
- J. Robertson, MRS Bull. 27, 217 (2002).
- (2002) MRS Bull. , vol.27 , pp. 217
- Robertson, J.¹

5
- 1142280285
- T. Gougousi and G. N. Parsons, J. Appl. Phys. 95, 1391 (2004).
- (2004) J. Appl. Phys. , vol.95 , pp. 1391
- Gougousi, T.¹ Parsons, G.N.²

6
- 23844503318
- D. J. Lichtenwalner, J. S. Jur, A. I. Kingon, M. P. Agustin, Y. Yang, S. Stemmer, L. V. Goncharova, T. Gustafsson, and E. Garfunkel, J. Appl. Phys. 98, 024314 (2005).
- (2005) J. Appl. Phys. , vol.98 , pp. 024314
- Lichtenwalner, D.J.¹ Jur, J.S.² Kingon, A.I.³ Agustin, M.P.⁴ Yang, Y.⁵ Stemmer, S.⁶ Goncharova, L.V.⁷ Gustafsson, T.⁸ Garfunkel, E.⁹

7
- 4944259427
- D. H. Triyoso, R. I. Hedge, J. Grant, P. Fejes, R. Liu, D. Roan, M. Ramon, D. Werho, R. Rai, L. B. La, J. Baker, C. Garza, T. Guenther, B. E. White, Jr., and P. J. Tobin, J. Vac. Sci. Technol. B 22, 2121 (2004).
- (2004) J. Vac. Sci. Technol. B , vol.22 , pp. 2121
- Triyoso, D.H.¹ Hedge, R.I.² Grant, J.³ Fejes, P.⁴ Liu, R.⁵ Roan, D.⁶ Ramon, M.⁷ Werho, D.⁸ Rai, R.⁹ La, L.B.¹⁰ Baker, J.¹¹ Garza, C.¹² Guenther, T.¹³ White Jr. B., E.¹⁴ Tobin, P.J.¹⁵

8
- 0000552940
- S. Guha, E. Cartier, M. A. Gribelyuk, N. A. Bojarczuk, and M. C. Copel, Appl. Phys. Lett. 77, 2710 (2000).
- (2000) Appl. Phys. Lett. , vol.77 , pp. 2710
- Guha, S.¹ Cartier, E.² Gribelyuk, M.A.³ Bojarczuk, N.A.⁴ Copel, M.C.⁵

9
- 29044435964
- D. H. Triyoso, R. I. Hedge, J. M. Grant, J. K. Schaeffer, D. Roan, B. E. White, Jr., and P. J. Tobin, J. Vac. Sci. Technol. B 23, 288 (2005).
- (2005) J. Vac. Sci. Technol. B , vol.23 , pp. 288
- Triyoso, D.H.¹ Hedge, R.I.² Grant, J.M.³ Schaeffer, J.K.⁴ Roan, D.⁵ White Jr. B., E.⁶ Tobin, P.J.⁷

10
- 24644504796
- A. Besmehn, A. Scholl, E. Rije, and U. Breuer, Appl. Surf. Sci. 252, 172 (2005).
- (2005) Appl. Surf. Sci. , vol.252 , pp. 172
- Besmehn, A.¹ Scholl, A.² Rije, E.³ Breuer, U.⁴

11
- 20944439392
- P. Sivasubramani, M. J. Kim, B. E. Gnade, R. M. Wallace, L. F. Edge, D. G. Schlom, H. S. Craft, and J.-P. Maria, Appl. Phys. Lett. 86, 201901 (2005).
- (2005) Appl. Phys. Lett. , vol.86 , pp. 201901
- Sivasubramani, P.¹ Kim, M.J.² Gnade, B.E.³ Wallace, R.M.⁴ Edge, L.F.⁵ Schlom, D.G.⁶ Craft, H.S.⁷ Maria, J.-P.⁸

12
- 84861443714
- M. A. Quevedo-Lopez, M. El-Bouanani, B. E. Gnade, R. M. Wallace, M. R. Visokay, M. Douglas, M. J. Bevan, and L. Colombo, J. Appl. Phys. 92, 3540 (2002).
- (2002) J. Appl. Phys. , vol.92 , pp. 3540
- Quevedo-Lopez, M.A.¹ El-Bouanani, M.² Gnade, B.E.³ Wallace, R.M.⁴ Visokay, M.R.⁵ Douglas, M.⁶ Bevan, M.J.⁷ Colombo, L.⁸

13
- 41149169700
- H. N. Alshareef, H. R. Harris, H. C. Wen, C. S. Park, C. Huffman, K. Choi, H. F. Luan, P. Majhi, B. H. Lee, R. Jammy, D. J. Lichtenwalner, J. S. Jur, and A. I. Kingon, VLSI Symp. Tech. Dig. 2006, 7.
- VLSI Symp. Tech. Dig. , vol.2006 , pp. 7
- Alshareef, H.N.¹ Harris, H.R.² Wen, H.C.³ Park, C.S.⁴ Huffman, C.⁵ Choi, K.⁶ Luan, H.F.⁷ Majhi, P.⁸ Lee, B.H.⁹ Jammy, R.¹⁰ Lichtenwalner, D.J.¹¹ Jur, J.S.¹² Kingon, A.I.¹³

14
- 33845419668
- H. N. Alshareef, M. Quevedo-Lopez, H. C. Wen, R. Harris, P. Kirsch, P. Majhi, B. H. Lee, R. Jammy, D. J. Lichtenwalner, J. S. Jur, and A. I. Kingon, Appl. Phys. Lett. 89, 232103 (2006).
- (2006) Appl. Phys. Lett. , vol.89 , pp. 232103
- Alshareef, H.N.¹ Quevedo-Lopez, M.² Wen, H.C.³ Harris, R.⁴ Kirsch, P.⁵ Majhi, P.⁶ Lee, B.H.⁷ Jammy, R.⁸ Lichtenwalner, D.J.⁹ Jur, J.S.¹⁰ Kingon, A.I.¹¹

15
- 33846962893
- D. J. Lichtenwalner, J. S. Jur, S. Novak, V. Misra, and A. I. Kingon, Electrochem. Soc. Trans. 3, 245 (2006).
- (2006) Electrochem. Soc. Trans. , vol.3 , pp. 245
- Lichtenwalner, D.J.¹ Jur, J.S.² Novak, S.³ Misra, V.⁴ Kingon, A.I.⁵

16
- 1642345135
- C. Gu, A. Pivovarov, R. Garcia, F. Stevie, D. Griffis, J. Moran, L. Kulig, and J. F. Richards, J. Vac. Sci. Technol. B 22, 350 (2004).
- (2004) J. Vac. Sci. Technol. B , vol.22 , pp. 350
- Gu, C.¹ Pivovarov, A.² Garcia, R.³ Stevie, F.⁴ Griffis, D.⁵ Moran, J.⁶ Kulig, L.⁷ Richards, J.F.⁸

17
- 0035477585
- J. P. Maria, D. Wicaksana, A. I. Kingon, B. Busch, H. Schulte, E. Garfunkel, and T. Gustafsson, J. Appl. Phys. 90, 3476 (2001).
- (2001) J. Appl. Phys. , vol.90 , pp. 3476
- Maria, J.P.¹ Wicaksana, D.² Kingon, A.I.³ Busch, B.⁴ Schulte, H.⁵ Garfunkel, E.⁶ Gustafsson, T.⁷

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