Calculation of electron inelastic mean free paths (IMFPs) VII. Reliability of the TPP-2M IMFP predictive equation

Surface and Interface Analysis

Volumn 35, Issue 3, 2003, Pages 268-275

  Tanuma, S ^a   Powell, C J ^b   Penn, D R ^b  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

^b NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

AES; Inelastic mean free path; TPP 2M equation; XPS

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; ELECTRONS; POTASSIUM COMPOUNDS; RELIABILITY; X RAY PHOTOELECTRON SPECTROSCOPY; YTTRIUM COMPOUNDS;

INELASTIC MEAN FREE PATHS (IMFP);

ELECTRON SCATTERING;

EID: 0037339998     PISSN: 01422421     EISSN: None     Source Type: Journal    
DOI: 10.1002/sia.1526     Document Type: Article

References (25)

1. Powell CJ, Jablonski A. J. Phys. Chem. Ref. Data 1999; 28:19.
2. Gergely G. Prog. Surf. Sci. 2002; 71: 31.
3. Jablonski A, Powell CJ. J. Vac. Sci. Tech. A 2003; 21: 274.
4. Tanuma S, Powell CJ, Penn DR. Surf. Interface Anal. 1988; 11: 577.
5. Tanuma S, Powell CJ, Penn DR. Surf. Interface Anal. 1991; 17: 911.
6. Tanuma S, Powell CJ, Penn DR. Surf. Interface Anal. 1991; 17: 929.
7. Tanuma S, Powell CJ, Penn DR. Surf. Interface Anal. 1993; 20: 77.
8. Tanuma S, Powell CJ, Penn DR. Surf. Interface Anal. 1994; 21: 165.
9. Tanuma S, Powell CJ, Penn DR. Surf. Interface Anal. 1997; 25: 25.
10. Tanuma S, Powell CJ, Penn DR. J. Electron Spectrosc. Relat. Phenom. 1993; 62: 95.
11. Bethe H. Ann. Phys. 1930; 5: 325.
12. Tanuma S, Powell CJ, Penn DR. Acta Phys. Polon. A 1992; 81: 169.
13. Evans S. Surf. Interface Anal. 1985; 7: 299.
14. Powell CJ, Jablonski A. NIST Electron Inelastic-Mean-Free-Path Database, SRD 71, Version 1.1. US Department of Commerce, National Institute of Standards and Technology: Gaithersburg, MD, 2000.
15. Netzer FP, Matthew JAD. Rep. Prog. Phys. 1986; 49: 621.
16. Tanuma S, Powell CJ, Penn DR. (to be published).
17. Wagner CD, Naumkin AV, Kraut-Vass A, Allison JW, Powell CJ, Rumble. Jr. NIST X-ray Photoelectron Spectroscopy Database, SRD 20, Version 3.2, 2002; http://srdata.nist.gov.xps.
18. Cardona M, Ley L (eds). Photoemission in Solids I. Springer-Verlag: Berlin, 1978.
19. Smith DM, Gallon TE, Matthew JAD. J. Phys. B 1974; 7: 1255.
20. Seah MP, Gilmore IS, Spencer SJ. Surf. Interface Anal. 2001; 31: 778.
21. Seah MP, Gilmore IS. Surf. Interface Anal. 1998; 26: 908.
22. Seah MP. J. Electron Spectrosc. Relat. Phenom. 1999; 100: 55.
23. Seah MP, Gilmore IS, Spencer SJ. J. Electron Spectrosc. Relat. Phenom. 2001; 120: 93.
24. Seah MP, Gilmore IS, Spencer SJ. J. Vac. Sci. Technol. A 2000; 18: 1083.
25. Tougaard S, Jansson C. Surf. Interface Anal. 1993; 20: 1013.