Formation of a stratified lanthanum silicate dielectric by reaction with Si(001)

Applied Physics Letters

Volumn 78, Issue 11, 2001, Pages 1607-1609

  Copel, M ^a   Cartier, E ^a   Ross, F M ^a  

^a IBM T J WATSON RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035848123     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1355002     Document Type: Article

References (9)

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