Electron energy-loss spectroscopy investigation of Y2O 3 films on Si (001) substrate

Thin Solid Films

Volumn 496, Issue 2, 2006, Pages 266-272

  Zhang, Jingmin ^a   Paumier, Fabien ^b   Höche, Thomas ^c   Heyroth, Frank ^a   Syrowatka, Frank ^a   Gaboriaud, Rolly J ^b   Leipner, Hartmut S ^a  

^a MARTIN LUTHER UNIVERSITY HALLE WITTENBERG   (Germany)

^b UNIVERSITÉ DE POITIERS   (France)

^c LEIBNIZ INSTITUTE OF SURFACE ENGINEERING IOM   (Germany)

Author keywords

Electron energy loss spectroscopy(EELS); Interfaces; Scanning electron microscopy; Yttrium

Indexed keywords

CHEMICAL REACTIONS; INTERFACES (MATERIALS); LIGHT SCATTERING; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING SILICON; SILICA; SUBSTRATES; THIN FILMS; YTTRIUM; YTTRIUM COMPOUNDS;

INTERFACE LAYERS; INTERFACES; MULTIPLE-SCATTERING METHODS; YTTRIUM SILICATES;

ELECTRON ENERGY LOSS SPECTROSCOPY;

EID: 28044443696     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.08.337     Document Type: Article

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