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Journal of Applied Physics

Volumn 106, Issue 11, 2009, Pages

Simplified one-dimensional calculation of 13.5 nm emission in a tin plasma including radiation transport

(4) White, J a Dunne, P a Hayden, P b O'Sullivan, G a

a UNIVERSITY COLLEGE DUBLIN (Ireland)

b DUBLIN CITY UNIVERSITY (Ireland)

Author keywords

[No Author keywords available]

Indexed keywords

13.5 NM; EXPERIMENTAL DATA; HARTREE-FOCK; HYDRODYNAMICS CODES; IN-BAND; LAGRANGIAN; LASER ENERGIES; LASER POWER DENSITY; LATERAL EXPANSION; ND: YAG; NEXT GENERATION LITHOGRAPHY; NORMAL INCIDENCE; PULSE DURATIONS; PURE TIN; RADIATION TRANSPORT; SEMICONDUCTOR INDUSTRY; TIME-DEPENDENT SPECTRUM; TIN PLASMA; TRANSITION ARRAYS; UNRESOLVED TRANSITION ARRAY; YTTRIUM ALUMINUM GARNET;

CONVERSION EFFICIENCY; FLUID DYNAMICS; GARNETS; LASERS; LIGHT; LITHOGRAPHY; NEODYMIUM LASERS; PULSED LASER APPLICATIONS; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR LASERS; SILICATE MINERALS; YTTRIUM;

TIN;

EID: 72449199468 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.3264692 Document Type: Article

Times cited : (9)

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