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Volumn 91, Issue 8, 2007, Pages

Angle-resolved absolute out-of-band radiation studies of a tin-based laser-produced plasma source

Author keywords

[No Author keywords available]

Indexed keywords

ANGULAR DISTRIBUTION; BAND STRUCTURE; FUNCTIONS; PHOTODIODES; RADIATION;

EID: 34548292607     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2769940     Document Type: Article
Times cited : (23)

References (13)
  • 10
    • 34548229600 scopus 로고    scopus 로고
    • International SEMATECH EUV Source WorkshoMeeting, February
    • L. A. Shmaenok, International SEMATECH EUV Source Workshop Meeting, February 2004 (unpublished) (http://www.sematech.org/meetings/archives/litho/ euvl/20040222b/posters/08Shmaenok.pdf).
    • (2004)
    • Shmaenok, L.A.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.