Step-edge calibration of torsional sensitivity for lateral force microscopy

Measurement Science and Technology

Volumn 20, Issue 11, 2009, Pages

  Sul, Onejae ^a   Jang, Seongjin ^a   Yang, Eui Hyeok ^a  

^a Stevens Institute of Technology   (United States)

Author keywords

Atomic force microscopy; Lateral force microscopy; Nanowire

Indexed keywords

CALIBRATION; ELASTIC MODULI; NANOCANTILEVERS; NANOPROBES; NANOWIRES; NICKEL; PHOTODIODES; SELF ASSEMBLY; TORSIONAL STRESS;

AFM CANTILEVERS; ATOMIC FORCE MICROSCOPE CANTILEVERS; CALIBRATION TECHNIQUES; LATERAL DIRECTIONS; LATERAL FORCE MICROSCOPY; LATERAL MOVEMENT; PREPARATION PROCESS; TORSIONAL SPRINGS;

ATOMIC FORCE MICROSCOPY;

EID: 72149107863     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/20/11/115104     Document Type: Article

References (24)

1. Cleveland J P, Manne M, Bocek D and Hansma P K 1993 A nondestructive method for determining the spring constant of cantilevers for scanning force microscopy Rev. Sci. Instrum. 64 403
2. Sader J E, Chon J W M and Mulvaney P 1999 Calibration of rectangular atomic force microscope cantilevers Rev. Sci. Instrum. 70 3967
3. Cain R G, Reitsma M G, Biggs S and Page N W 2001 Quantitative comparison of three calibration techniques for the lateral force microscope Rev. Sci. Instrum. 72 3304
4. Pettersson T, Nordgren N, Rutland M W and Feiler A 2007 Comparison of different methods to calibrate torsional spring constant and photodetector for atomic force microscopy friction measurements in air and liquid Rev. Sci. Instrum. 78 093702
5. Jeon S, Braiman Y and Thundat T 2004 Torsional spring constant obtained for an atomic force microscope cantilever Appl. Phys. Lett. 84 1795
6. Tocha E, Song J, Schoherr H and Vancso G J 2007 Calibration of friction force signals in atomic force microscopy in liquid media Langmuir 23 7078
7. Cannara R J, Eglin M and Carpick R W 2006 Lateral force calibration in atomic force microscopy: a new lateral force calibration method and general guidelines for optimization Rev. Sci. Instrum. 77 053701
8. Green C P, Lioe H, Cleveland J P, Proksch R, Mulvaney P and Sader J E 2004 Normal and torsional spring constants of atomic force microscope cantilevers Rev. Sci. Instrum. 75 1988
9. Ecke S, Raiteri R, Bonaccurso E, Reiner C, Deiseroth H-J and Butt H-J 2001 Measuring normal and friction forces acting on individual fine particles Rev. Sci. Instrum. 72 4164
10. Cain R G, Biggs S and Page N W 2000 Force calibration in lateral force microscopy J. Colloid Interface Sci. 227 55
11. Liu E, Blanpain B and Celis J P 1996 Calibration procedures for frictional measurements with a lateral force microscope Wear 192 141
12. Ogletree D F, Carpick R W and Salmeron M 1996 Calibration of frictional forces in atomic force microscopy Rev. Sci. Instrum. 67 3298
13. Feiler A, Attard P and Larson I 2000 Calibration of the torsional spring constant and the lateral photodiode response of frictional force microscopes Rev. Sci. Instrum. 71 2746
14. Bogdanovic G, Meurk A and Rutland M W 2000 Tip friction-torsional spring constant determination Colloids Surf. B 19 397
15. Schaffer T E 2002 Force spectroscopy with a large dynamic range using small cantilevers and an array detector J. Appl. Phys. 91 4739
16. Gibson C T, Watson G S and Myhra S 1997 Lateral force microscopy a quantitative approach Wear 213 72
17. Hess P 1996 Laser diagnostics of mechanical and elastic properties of silicon and carbon films Appl. Surf. Sci. 106 433
18. Stevens K M 1996 IEEE Micro Electro Mechanical Systems Workshop (San Diego, CA) p 97
19. Fenner R T 1989 Mechanics of Solids (Boca Raton, FL: CRC Press)
20. Routkevitch D, Tager A A, Haruyama J, Almawlawi D, Moskovits M and Xu J M 1996 Nonlithographic nano-wire arrays: fabrication, physics, and device applications IEEE Trans. Electron Devices 43 1646
21. Luo J K, Flewitt A J, Spearing S M, Fleck N A and Milne W I 2004 Young's modulus of electroplated Ni thin film for MEMS applications Mater. Lett. 58 2306
22. Kim S H and Boyd J G 2006 A new technique for measuring Young's modulus of electroplated nickel using AFM Meas. Sci. Technol. 17 2343
23. Fritz T, Griepentrog M, Mokwa W and Schnakenberg U 2003 Determination of Young's modulus of electroplated nickel Electrochim. Acta 48 571
24. Zhou Z M, Zhou Y, Yang C S, Chen J A, Ding G F, Ding W, Wang M J and Jang Y M 2004 The evaluation of Young's modulus and residual stress of nickel films by microbridge testings Meas. Sci. Technol. 15 2389