A new technique for measuring Young's modulus of electroplated nickel using AFM

Measurement Science and Technology

Volumn 17, Issue 8, 2006, Pages 2343-2348

  Kim, Sang Hyun ^a,b   Boyd, James G ^b  

^a Samsung Advanced Institute of Technology (SAIT)   (South Korea)

^b Department of Electrical and Computer Engineering   (United States)

Author keywords

Atomic force microscope; Electroplated nickel; Resonant frequency; Spring constant; Young's modulus

Indexed keywords

ATOMIC FORCE MICROSCOPY; CANTILEVER BEAMS; ELASTIC MODULI; NATURAL FREQUENCIES; SILICON; SPRINGS (COMPONENTS);

ATOMIC FORCE MICROSCOPES; ELECTROPLATED CANTILEVERS; ELECTROPLATED NICKEL; SPRING CONSTANT;

NICKEL PLATING;

ATOMIC FORCE MICROSCOPY; CANTILEVER BEAMS; ELASTIC MODULI; NATURAL FREQUENCIES; NICKEL PLATING; SILICON; SPRINGS (COMPONENTS);

EID: 33746313932     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/17/8/041     Document Type: Article

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