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Volumn 1112, Issue , 2009, Pages 91-99

Ambient copper-copper thermocompression bonding using self-assembled monolayers

Author keywords

[No Author keywords available]

Indexed keywords

A-THERMAL; AMBIENT CONDITIONS; AMBIENT TEMPERATURES; BOND FORMATION; BOND STRENGTH; BONDING INTERFACES; BONDING TEMPERATURES; BULK OXIDES; COPPER ATOMS; COPPER SURFACE; JOINT STRENGTH; MECHANICAL DEFORMATION; ORGANIC MONOLAYERS; PHYSICAL CONTACTS; ROOM TEMPERATURE; TEMPERATURE DEPENDENCE; THERMAL DEPENDENCES; THERMO COMPRESSION BONDING; THERMO-COMPRESSION; ULTRA-CLEAN ENVIRONMENT; ULTRA-THIN;

EID: 70449638226     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (6)

References (35)
  • 5
    • 0942277788 scopus 로고    scopus 로고
    • K. N. Chen, A. Fan, C. S. T. and, and R. Reif, J. Electron Mat, 32, 1371-1374, (2003).
    • K. N. Chen, A. Fan, C. S. T. and, and R. Reif, "J. Electron Mat, 32, 1371-1374, (2003).
  • 32
    • 41549132281 scopus 로고    scopus 로고
    • X. F. Ang, F. Y. Li, W. L. Tan, Z. Chen, C. C. Wong, and J. Wei, Low Temperature Direct Metal Bonding by Self Assembled Monolayers, in Materials Research Society Symposium Proceedings, 990 San Francisco, US, 2007, pp. 0990-B10-03.
    • X. F. Ang, F. Y. Li, W. L. Tan, Z. Chen, C. C. Wong, and J. Wei, "Low Temperature Direct Metal Bonding by Self Assembled Monolayers," in Materials Research Society Symposium Proceedings, vol. 990 San Francisco, US, 2007, pp. 0990-B10-03.
  • 35
    • 70449626941 scopus 로고    scopus 로고
    • H. L. Leong, C. L. Gan, C. V. Thompson, K. L. Pey, and H. Y. Li, Effects of Nanometer-Scale Surface Roughness and Applied Load on the Bond Strength and Contact Resistance of Cu-Cu Bonded 3D ICs, in Materials Research Society: Symposium Proceedings, Boston, MA, 2007, pp. 1036-M02-05.
    • H. L. Leong, C. L. Gan, C. V. Thompson, K. L. Pey, and H. Y. Li, "Effects of Nanometer-Scale Surface Roughness and Applied Load on the Bond Strength and Contact Resistance of Cu-Cu Bonded 3D ICs," in Materials Research Society: Symposium Proceedings, Boston, MA, 2007, pp. 1036-M02-05.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.