SCOPUS 정보 검색 플랫폼

Diamond and Related Materials

Volumn 12, Issue 9, 2003, Pages 1495-1499

Fabrication of amorphous carbon cantilever structures by isotropic and anisotropic wet etching methods

(7) Sheeja, D a Tay, B K a Yu, L J a Chua, D H C b Milne, W I b Miao, J c Fu, Y Q c

a NANYANG TECHNOLOGICAL UNIVERSITY (Singapore)

b UNIVERSITY OF CAMBRIDGE (United Kingdom)

c NANYANG TECHNOLOGICAL UNIVERSITY (Singapore)

Author keywords

Amorphous carbon; Anisotropic and isotropic wet Si etching; Low stress; MEMS

Indexed keywords

CANTILEVER BEAMS; CARBON; ETCHING; FRICTION; MICROELECTROMECHANICAL DEVICES; PHOTOLITHOGRAPHY; STRESS ANALYSIS;

WET ETCHING;

AMORPHOUS MATERIALS;

FABRICATION;

EID: 0142230592 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/S0925-9635(03)00182-1 Document Type: Article

Times cited : (10)

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