Longitudinal and transversal piezoresistive effect in hydrogenated amorphous carbon films

Thin Solid Films

Volumn 515, Issue 20-21, 2007, Pages 8028-8033

  Tibrewala, A ^a   Peiner, E ^a   Bandorf, R ^b   Biehl, S ^b   Luthje H ^b  

^a TECHNICAL UNIVERSITY OF BRAUNSCHWEIG   (Germany)

^b FRAUNHOFER INSTITUTE FOR SURFACE ENGINEERING AND THIN FILMS IST   (Germany)

Author keywords

Diamond like carbon; Hydrogenated amorphous carbon; I V; Piezoresistive gauge factor

Indexed keywords

CARBON FILMS; DIAMOND LIKE CARBON FILMS; HYDROGENATION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; STRAIN; THERMAL EFFECTS;

CURRENT FLOW DIRECTIONS; DIAMOND-LIKE CARBONS; PIEZORESISTIVE EFFECTS; VERTICAL CURRENT FLOW;

AMORPHOUS FILMS;

EID: 34547655395     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.03.046     Document Type: Article

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