Effects of target bias voltage on the electrical conductivity of DLC films deposited by PBII/D with a bipolar pulse

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 242, Issue 1-2, 2006, Pages 346-348

  Miyagawa, S ^a   Nakao, S ^a   Choi, J ^a   Ikeyama, M ^a   Miyagawa, Y ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

DLC; Hardness; PBII; Resistivity

Indexed keywords

COATINGS; ELECTRIC CONDUCTIVITY; ELECTRIC POTENTIAL; ELECTRONS; HARDNESS; HIGH RESOLUTION ELECTRON MICROSCOPY; IONS; PLASMAS; RAMAN SPECTROSCOPY; TRANSMISSION ELECTRON MICROSCOPY; X RAY PHOTOELECTRON SPECTROSCOPY;

BIAS VOLTAGE; DLC; PBII; RESISTIVITY;

DIAMOND LIKE CARBON FILMS;

EID: 28544450745     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2005.08.051     Document Type: Conference Paper

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