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Journal of Applied Physics

Volumn 106, Issue 4, 2009, Pages

Depth resolution function of the laser assisted tomographic atom probe in the investigation of semiconductors

(5) Cadel, Emmanuel a Vurpillot, Fraņois a Lardé, Rodrigue a Duguay, Sébastien a Deconihout, Bernard a

a UNIVERSITÉ DE ROUEN (France)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC PLANES; DELTA LAYERS; DEPTH RESOLUTION FUNCTION; LASER-ASSISTED; REAL-SPACE; SPATIAL RESOLUTION; TOMOGRAPHIC ATOM PROBES;

ATOMS; BORON; BORON COMPOUNDS; PROBES; SECONDARY ION MASS SPECTROMETRY; SPACE PROBES;

DEPTH PROFILING;

EID: 69749120741 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.3186617 Document Type: Article

Times cited : (83)

References (32)

1
- 69749104968
- ITRS 2007, Metrology.
- ITRS 2007, Metrology, http://www.itrs.net/.

2
- 56749117766
- 0169-4332,. 10.1016/j.apsusc.2008.05.090
- W. Vandervorst, Appl. Surf. Sci. 0169-4332 255, 805 (2008). 10.1016/j.apsusc.2008.05.090
- (2008) Appl. Surf. Sci. , vol.255 , pp. 805
- Vandervorst, W.¹

3
- 0043055020
- 2nd ed. (Springer-Verlag, Heidelberg).
- B. Bhushan, Springer Handbook of Nanotechnology, 2nd ed. (Springer-Verlag, Heidelberg, 2007).
- (2007) Springer Handbook of Nanotechnology
- Bhushan, B.¹

4
- 0003513853
- (Oxford, New York).
- M. K. Miller, A. Cerezo, M. G. Hetherington, and G. D. W. Smith, Atom Probe Field Ion Microscopy (Oxford, New York, 2005).
- (2005) Atom Probe Field Ion Microscopy
- Miller, M.K.¹ Cerezo, A.² Hetherington, M.G.³ Smith, G.D.W.⁴

5
- 34047158735
- Invited review article: Atom probe tomography
- DOI 10.1063/1.2709758
- T. F. Kelly and M. K. Miller, Rev. Sci. Instrum. 0034-6748 78, 031101 (2007). 10.1063/1.2709758 (Pubitemid 46517307)
- (2007) Review of Scientific Instruments , vol.78 , Issue.3 , pp. 031101
- Kelly, T.F.¹ Miller, M.K.²

6
- 44449129910
- 1862-5282.
- D. Blavette, T. Al Kassab, E. Cadel, F. Vurpillot, and B. Deconihout, Int. J. Mater. Res. 1862-5282 99, 454 (2008).
- (2008) Int. J. Mater. Res. , vol.99 , pp. 454
- Blavette, D.¹ Al Kassab, T.² Cadel, E.³ Vurpillot, F.⁴ Deconihout, B.⁵

7
- 33646392741
- 0034-6748,. 10.1063/1.2194089
- B. Gault, F. Vurpillot, A. Vella, M. Gilbert, A. Menand, D. Blavette, and B. Deconihout, Rev. Sci. Instrum. 0034-6748 77, 043705 (2006). 10.1063/1.2194089
- (2006) Rev. Sci. Instrum. , vol.77 , pp. 043705
- Gault, B.¹ Vurpillot, F.² Vella, A.³ Gilbert, M.⁴ Menand, A.⁵ Blavette, D.⁶ Deconihout, B.⁷

8
- 34548673474
- Atom probe tomography of electronic materials
- DOI 10.1146/annurev.matsci.37.052506.084239
- T. F. Kelly, D. J. Larson, K. Thompson, R. L. Alvis, J. H. Bunton, J. D. Olson, and B. P. Gorman, Annu. Rev. Mater. Res. 1531-7331 37, 681 (2007). 10.1146/annurev.matsci.37.052506.084239 (Pubitemid 47497660)
- (2007) Annual Review of Materials Research , vol.37 , pp. 681-727
- Kelly, T.E.¹ Larson, D.J.² Thompson, K.³ Alvis, R.L.⁴ Bunton, J.H.⁵ Olson, J.D.⁶ Gorman, B.R.⁷

9
- 33845653182
- Observations of Si field evaporation
- DOI 10.1016/j.ultramic.2006.06.007, PII S0304399106001197
- K. Thompson, J. Sebastian, and S. Gerstl, Ultramicroscopy 0304-3991 107, 124 (2007). 10.1016/j.ultramic.2006.06.007 (Pubitemid 44959444)
- (2007) Ultramicroscopy , vol.107 , Issue.2-3 , pp. 124-130
- Thompson, K.¹ Sebastian, J.² Gerstl, S.³

10
- 34249051372
- Some aspects of the silicon behaviour under femtosecond pulsed laser field evaporation
- DOI 10.1016/j.ultramic.2007.02.027, PII S0304399107000551, IFES 2006
- M. Gilbert, F. Vurpillot, A. Vella, H. Bernas, and B. Deconihout, Ultramicroscopy 0304-3991 107, 767 (2007). 10.1016/j.ultramic.2007.02.027 (Pubitemid 46803080)
- (2007) Ultramicroscopy , vol.107 , Issue.9 , pp. 767-772
- Gilbert, M.¹ Vurpillot, F.² Vella, A.³ Bernas, H.⁴ Deconihout, B.⁵

11
- 31544482788
- Characterization of ultralow-energy implants and towards the analysis of three-dimensional dopant distributions using three-dimensional atom-probe tomography
- DOI 10.1116/1.2141621
- K. Thompson, J. H. Bunton, T. F. Kelly, and D. J. Larson, J. Vac. Sci. Technol. B 1071-1023 24, 421 (2006). 10.1116/1.2141621 (Pubitemid 43164250)
- (2006) Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures , vol.24 , Issue.1 , pp. 421-427
- Thompson, K.¹ Bunton, J.H.² Kelly, T.F.³ Larson, D.J.⁴

12
- 33645499321
- 0003-6951,. 10.1063/1.2005368
- K. Thompson, J. Booske, D. J. Larson, and T. F. Kelly, Appl. Phys. Lett. 0003-6951 87, 052108 (2005). 10.1063/1.2005368
- (2005) Appl. Phys. Lett. , vol.87 , pp. 052108
- Thompson, K.¹ Booske, J.² Larson, D.J.³ Kelly, T.F.⁴

13
- 34548683658
- Imaging of arsenic Cottrell atmospheres around silicon defects by three-dimensional atom probe tomography
- DOI 10.1126/science.1145428
- K. Thompson, P. L. Flaitz, P. Ronsheim, D. J. Larson, and T. F. Kelly, Science 0036-8075 317, 1370 (2007). 10.1126/science.1145428 (Pubitemid 47417473)
- (2007) Science , vol.317 , Issue.5843 , pp. 1370-1374
- Thompson, K.¹ Flaitz, P.L.² Ronsheim, P.³ Larson, D.J.⁴ Kelly, T.F.⁵

14
- 0032586219
- 0304-3991,. 10.1016/S0304-3991(99)00055-8
- D. J. Larson, D. T. Foord, A. K. Petford-Long, H. Liew, M. G. Blamire, A. Cerezo, and G. D. W. Smith, Ultramicroscopy 0304-3991 79, 287 (1999). 10.1016/S0304-3991(99)00055-8
- (1999) Ultramicroscopy , vol.79 , pp. 287
- Larson, D.J.¹ Foord, D.T.² Petford-Long, A.K.³ Liew, H.⁴ Blamire, M.G.⁵ Cerezo, A.⁶ Smith, G.D.W.⁷

15
- 45149102165
- 0003-6951,. 10.1063/1.2918846
- M. Müller, A. Cerezo, G. D. W. Smith, L. Chang, and S. S. A. Gerstl, Appl. Phys. Lett. 0003-6951 92, 233115 (2008). 10.1063/1.2918846
- (2008) Appl. Phys. Lett. , vol.92 , pp. 233115
- Müller, M.¹ Cerezo, A.² Smith, G.D.W.³ Chang, L.⁴ Gerstl, S.S.A.⁵

16
- 51749125034
- 0003-6951,. 10.1063/1.2970964
- A. N. Chiaramonti, D. K. Schreiber, W. F. Egelhoff, D. N. Seidman, and A. K. Petford-Long, Appl. Phys. Lett. 0003-6951 93, 103113 (2008). 10.1063/1.2970964
- (2008) Appl. Phys. Lett. , vol.93 , pp. 103113
- Chiaramonti, A.N.¹ Schreiber, D.K.² Egelhoff, W.F.³ Seidman, D.N.⁴ Petford-Long, A.K.⁵

17
- 52349113446
- 0167-9317,. 10.1016/j.mee.2008.04.048
- D. Mangelinck, K. Hoummada, O. Cojocaru-Miŕdin, E. Cadel, C. Perrin-Pellegrino, and D. Blavette, Microelectron. Eng. 0167-9317 85, 1995 (2008). 10.1016/j.mee.2008.04.048
- (2008) Microelectron. Eng. , vol.85 , pp. 1995
- Mangelinck, D.¹ Hoummada, K.² Cojocaru-Miŕdin, O.³ Cadel, E.⁴ Perrin-Pellegrino, C.⁵ Blavette, D.⁶

18
- 34249060959
- Atom probe specimen preparation with a dual beam SEM/FIB miller
- DOI 10.1016/j.ultramic.2007.02.023, PII S030439910700054X, IFES 2006
- M. K. Miller and K. F. Russell, Ultramicroscopy 0304-3991 107, 761 (2007). 10.1016/j.ultramic.2007.02.023 (Pubitemid 46803079)
- (2007) Ultramicroscopy , vol.107 , Issue.9 , pp. 761-766
- Miller, M.K.¹ Russell, K.F.²

19
- 25344447278
- 0039-6028,. 10.1016/0039-6028(75)90375-1
- A. J. Melmed and R. J. Stein, Surf. Sci. 0039-6028 49, 645 (1975). 10.1016/0039-6028(75)90375-1
- (1975) Surf. Sci. , vol.49 , pp. 645
- Melmed, A.J.¹ Stein, R.J.²

20
- 35949012501
- 0031-9007,. 10.1103/PhysRevLett.58.1535
- H. M. Liu, T. T. Tsong, and Y. Liou, Phys. Rev. Lett. 0031-9007 58, 1535 (1987). 10.1103/PhysRevLett.58.1535
- (1987) Phys. Rev. Lett. , vol.58 , pp. 1535
- Liu, H.M.¹ Tsong, T.T.² Liou, Y.³

21
- 0000467272
- 0022-2720,. 10.1046/j.1365-2818.2001.00923.x
- F. Vurpillot, G. Da Costa, A. Menand, and D. Blavette, J. Microsc. 0022-2720 203, 295 (2001). 10.1046/j.1365-2818.2001.00923.x
- (2001) J. Microsc. , vol.203 , pp. 295
- Vurpillot, F.¹ Da Costa, G.² Menand, A.³ Blavette, D.⁴

22
- 0039720909
- 0039-6028,. 10.1016/0039-6028(78)90222-4
- T. Sakurai, R. J. Culbertson, and A. J. Melmed, Surf. Sci. 0039-6028 78, L221 (1978). 10.1016/0039-6028(78)90222-4
- (1978) Surf. Sci. , vol.78 , pp. 221
- Sakurai, T.¹ Culbertson, R.J.² Melmed, A.J.³

23
- 33747190889
- + beams down to 150 eV
- DOI 10.1016/j.apsusc.2006.02.242, PII S0169433206004399
- M. Juhel, F. Laugier, D. Delille, C. Wyon, L. F. Tz. Kwakman, and M. Hopstaken, Appl. Surf. Sci. 0169-4332 252, 7211 (2006). 10.1016/j.apsusc.2006. 02.242 (Pubitemid 44233817)
- (2006) Applied Surface Science , vol.252 , Issue.19 , pp. 7211-7213
- Juhel, M.¹ Laugier, F.² Delille, D.³ Wyon, C.⁴ Kwakman, L.F.Tz.⁵ Hopstaken, M.⁶

24
- 0036836730
- 0022-0248,. 10.1016/S0022-0248(02)01643-3
- N. Baboux, J. C. Dupuy, G. Prudon, P. Holliger, F. Laugier, A. M. Papon, and J. M. Hartmann, J. Cryst. Growth 0022-0248 245, 1 (2002). 10.1016/S0022-0248(02)01643-3
- (2002) J. Cryst. Growth , vol.245 , pp. 1
- Baboux, N.¹ Dupuy, J.C.² Prudon, G.³ Holliger, P.⁴ Laugier, F.⁵ Papon, A.M.⁶ Hartmann, J.M.⁷

25
- 0028383168
- 0169-4332,. 10.1016/0169-4332(94)90335-2
- B. Deconihout, A. Bostel, P. Bas, S. Chambreland, L. Letellier, F. Danoix, and D. Blavette, Appl. Surf. Sci. 0169-4332 76-77, 145 (1994). 10.1016/0169-4332(94)90335-2
- (1994) Appl. Surf. Sci. , vol.7677 , pp. 145
- Deconihout, B.¹ Bostel, A.² Bas, P.³ Chambreland, S.⁴ Letellier, L.⁵ Danoix, F.⁶ Blavette, D.⁷

26
- 4244005334
- 1155-4339,. 10.1051/jp4:1996533
- A. Cerezo, D. Gibuoin, S. Kim, S. Sijbrandij, F. Venker, P. Warren, J. Wilde, and G. Smith, J. Phys. IV 1155-4339 06, C5-205 (1996). 10.1051/jp4:1996533
- (1996) J. Phys. IV , vol.6 , pp. 5-205
- Cerezo, A.¹ Gibuoin, D.² Kim, S.³ Sijbrandij, S.⁴ Venker, F.⁵ Warren, P.⁶ Wilde, J.⁷ Smith, G.⁸

27
- 0037402101
- A new step towards the lattice reconstruction in 3DAP
- DOI 10.1016/S0304-3991(02)00320-0, PII S0304399102003200
- F. Vurpillot, L. Renaud, D. Blavette, and B. Deconihout, Ultramicroscopy 0304-3991 95, 223 (2003). 10.1016/S0304-3991(02)00320-0 (Pubitemid 36132161)
- (2003) Ultramicroscopy , vol.95 , Issue.SUPPL. , pp. 223-229
- Vurpillot, F.¹ Renaud, L.² Blavette, D.³

28
- 36248941516
- Spatial distribution maps for atom probe tomography
- DOI 10.1017/S1431927607070948, PII S1431927607070948
- B. P. Geiser, T. F. Kelly, D. J. Larson, J. Schneir, and J. P. Roberts, Microsc. Microanal. 1431-9276 13, 437 (2007). 10.1017/S1431927607070948 (Pubitemid 350126555)
- (2007) Microscopy and Microanalysis , vol.13 , Issue.6 , pp. 437-447
- Geiser, B.P.¹ Kelly, T.F.² Larson, D.J.³ Schneir, J.⁴ Roberts, J.P.⁵

29
- 46749115199
- Estimation of the reconstruction parameters for atom probe tomography
- DOI 10.1017/S1431927608080690, PII S1431927608080690
- B. Gault, F. de Geuser, L. T. Stephenson, M. P. Moody, B. C. Muddle, and S. P. Ringer, Microsc. Microanal. 1431-9276 14, 296 (2008). 10.1017/ S1431927608080690 (Pubitemid 351950187)
- (2008) Microscopy and Microanalysis , vol.14 , Issue.4 , pp. 296-305
- Gault, B.¹ De Geuser, F.² Stephenson, L.T.³ Moody, M.P.⁴ Muddle, B.C.⁵ Ringer, S.P.⁶

30
- 0003662668
- (Cambridge University Press, Cambridge, London).
- T. T. Tsong, Atom-Probe Field Ion Microscopy: Field Ion Emission, and Surfaces and Interfaces at Atomic Resolution (Cambridge University Press, Cambridge, London, 1989).
- (1989) Atom-Probe Field Ion Microscopy: Field Ion Emission, and Surfaces and Interfaces at Atomic Resolution
- Tsong, T.T.¹

31
- 0029755315
- 0255-5476,. 10.4028/www.scientific.net/MSF.207-209.79
- D. Blavette, L. Letellier, P. Duval, and M. Guttmann, Mater. Sci. Forum 0255-5476 207-209, 79 (1996). 10.4028/www.scientific.net/MSF.207-209.79
- (1996) Mater. Sci. Forum , vol.207-209 , pp. 79
- Blavette, D.¹ Letellier, L.² Duval, P.³ Guttmann, M.⁴

32
- 0000387490
- 0031-9007,. 10.1103/PhysRevLett.74.403
- Y. Wang and J. R. Hamers, Phys. Rev. Lett. 0031-9007 74, 403 (1995). 10.1103/PhysRevLett.74.403
- (1995) Phys. Rev. Lett. , vol.74 , pp. 403
- Wang, Y.¹ Hamers, J.R.²

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