Estimation of the reconstruction parameters for atom probe tomography

Microscopy and Microanalysis

Volumn 14, Issue 4, 2008, Pages 296-305

  Gault, Baptiste ^a   De Geuser, Frederic ^b   Stephenson, Leigh T ^a   Moody, Michael P ^a   Muddle, Barrington C ^b   Ringer, Simon P ^a  

^a UNIVERSITY OF SYDNEY   (Australia)

^b MONASH UNIVERSITY   (Australia)

Author keywords

Atom probe tomography (APT); Data analysis; Field desorption microscopy; Fourier analysis; Spatial resolution; Three dimensional reconstruction

Indexed keywords

EID: 46749115199     PISSN: 14319276     EISSN: 14358115     Source Type: Journal    
DOI: 10.1017/S1431927608080690     Document Type: Article

References (47)

1. BAS, P., BOSTEL, A., DECONIHOUT, B. & BLAVETTE, D. (1995). A general protocol for the reconstruction of 3D atom probe data. Appl Surf Sci 87/88, 298-304.
2. BLAVETTE, D., BOSTEL, A., SARRAU, J.M., DECONIHOUT, B. & MENAND, A. (1993a). An atom probe for three-dimensional tomography. Nature 363, 432-435.
3. BLAVETTE, D., CADEL, E., FRACZKIEWICZ, A. & MENAND, A. (1999). Three-dimensional atomic-scale imaging of impurity segregation to line defects. Science 286, 2317-2319.
4. BLAVETTE, D., DECONIHOUT, B., BOSTEL, A., SARRAU, J.M., BOUET, M. & MENAND, A. (1993b). The tomographic atom probe: A quantitative three-dimensional nanoanalytical instrument on an atomic scale. Rev Sci Instrum 64, 2911-2919.
5. BRANDON, D.G. (1964).The accurate determination of crystal orientation from field ion micrographs. J Sci Instrum 41, 373-375.
6. BRANDON, D.G. (1968). Field evaporation and gas impact, field etching and field deformation. In Field Ion Microscopy, Hren, J.J. & Ranganathan, S. (Eds.), pp. 28-52. New York: Plenum.
7. CAMUS, P.P., LARSON, D.J. & KELLY, T.F. (1995). A method for reconstructing and locating atoms on the crystal lattice in three dimensional atom probe data. Appl Surf Sci 87/88, 305-310.
8. CEREZO, A., GODFREY, T.J. & SMITH, G.D.W. (1988). Application of a position-sensitive detector to atom probe microanalysis. Rev Sci Instrum 59, 862-866.
9. CEREZO, A., WARREN, P.J. & SMITH, G.D.W. (1999). Some aspects of image projection in the field-ion microscope. Ultramicroscopy 79, 251-257.
10. DE GEUSER, F., LEFEBVRE, W. & BLAVETTE, D. (2006). 3D atom probe study of solute atoms clustering during natural ageing and pre-ageing of an Al-Mg-Si alloy. Phil Mag Lett 86, 227-234.
11. DRESCHLER, M. & WOLF, D. (1958). Zur Analyse von Feldionenmikroscop-Aufnahmen mit atomarer Auflösung. Proc 4th Int Conf Electron Microscopy, pp. 835-848. Berlin: Springer.
12. EDWARDS, G.A., STILLER, K., DUNLOP, G.L. & COUPER, M.J. (1998). The precipitation sequence in Al-Mg-Si alloys. Acata Mat 46, 3893-3904.
13. GAULT, B., VURPILLOT, F., VELLA, A., GILBERT, M., MENAND, A., BLAVETTE, D. & DECONIHOUT, B. (2006). Design of a femto-second laser assisted tomographic atom probe. Rev Sci Instrum 77, 043705.
14. GEISER, B.P., KELLY, T.F., LARSON, D.J., SCHNEIR, J. & ROBERTS, J.P. (2007). Spatial distribution maps for atom probe tomography. Micros Microanal 13, 437-447.
15. GOMER, R. (1961). Field Emission and Field Ionization. London: Oxford University Press.
16. GORMAN, B. (2007). Atom probe reconstruction refinements by pre- and post-analysis TEM structure quantification. Microsc Microanal 13, 1616-1617.
17. HONO, K., HIRAGA, K., WANG, Q., INOUE, A. & SAKURAI, T. (1992). The microstructure evolution of a Fe73.5Si13.5B9Nb3Cu1 nanocrystalline soft magnetic material. Acta Met Mat 40, 2137-2147.
18. HYDE, J.M., CEREZO, A., SETNA, R.P., WARREN, P.J. & SMITH, G.D.W. (1994). Lateral and depth scale calibration of the position sensitive atom probe. Appl Surf Sci 76/77, 382-391.
19. KELLOGG, G.L. & TSONG, T.T. (1980). Pulsed-laser atom-probe field-ion microscopy. J Appl Phys 51, 1184-1193.
20. KELLY, T.F., CAMUS, P.P., LARSON, D.J., HOLZMAN, L.M. & BAJIKAR, S.S. (1996). On the many advantages of local electrode atom probes. Ultramicroscopy 62, 29-42.
21. KELLY, T.F., GRIBB, T.T., OLSON, J.D., MARTENS, R.L., SHEPARD, J.D., WIENER, S.A., KUNICKI, T.C., ULFIG, R.M., LENZ, D.R., STRENNEN, E.M., OLTMAN, E., BUNTON, J.H. & STRAIT, D.R. (2004). First data from a commercial local electrode atom probe (LEAP). Microsc Microanal 10, 373-383.
22. KELLY, T.F., LARSON, D.J., THOMPSON, K., ALVIS, R.L., BUNTON, J.H., OLSON, J.D. & GORMAN, B.P. (2007). Atom probe tomography of electronic materials. Annu Rev Mater Res 37, 681-727.
23. KELLY, T.F. & MILLER, M.K. (2007). Invited review article: Atom probe tomography. Rev Sci Instrum 78, 031101.
24. MILLER, M.K., CEREZO, A., HETHERINGTON, M.G. & SMITH, G.D.W. (Eds.) (1996). Atom Probe Field Ion Microscopy. Oxford: Oxford University Press.
25. MOODY, M.P., STEPHENSON, L.T., LIDDICOAT, P.V. & RINGER, S.P. (2007). Contingency table techniques for three dimensional atom probe tomography. Microsc Res Tech 70, 258-268.
26. MÜLLER, E.W. (1965). Field ion microscopy. Science 149, 591-601.
27. MÜLLER, E.W. & BAHADUR, K. (1956). Field ionization of gases at a metal surface and the resolution of the FIM. Phys Rev 102, 624-631.
28. MÜLLER, E.W., PANITZ, J.A. & MCCLEAN, S.B. (1968). The atom probe field ion microscope. Rev Sci Instrum 39, 83-86.
29. NEWMAN, R.W., SANWALD, R.C. & HREN, J.J. (1967). A method for indexing field ion micrographs. J Sci Instrum 44, 828-830.
30. PANITZ, J.A. (1973). The 10 cm atom probe. Rev Sci Instrum 44, 1034-1038.
31. PANITZ, J.A. (1974). The crystallographic distribution of field-desorbed species. J Vac Sci Tech 11, 207-210.
32. PANITZ, J.A. (1978). Imaging atom-probe mass spectroscopy. Prog Surf Sci 8, 219-262.
33. SAKURAI, T. & MÜLLER, E.W. (1973). Field calibration using the energy distribution of field ionization. Phys Rev Lett 30, 532-535.
34. SAKURAI, T. & MÜLLER, E.W. (1977). Field calibration using the energy distribution of a free-space field ionization. J Appl Phys 48, 2618-2625.
35. SEIDMAN, D.N. (2007). Three-dimensional atom-probe tomography: Advances and applications. Annu Rev Mater Res 37, 127-158.
36. SUCHORSKI, Y., SCHMIDT, W.A., ERNST, N. & BLOCK, J.H. (1995). Electrostatic fields above individual atoms. Prog Surf Sci 48, 121-134.
37. THOMPSON, K., FLAITZ, P.L., RONSHEIM, P., LARSON, D.J. & KELLY, T.F. (2007). Imaging of arsenic Cottrell atmospheres around silicon defects by three-dimensional atom probe tomography. Science 317, 1370-1374.
38. TIMOKHINA, I.B., HODGSON, P.D., RINGER, S.P., ZHENG, R.K. & PERELOMA, E.V. (2007). Precipitate characterisation of an advanced high-strength low-alloy (HSLA) steel using atom probe tomography. Scripta Mat 56, 601-604.
39. TSONG, T.T. (1971). Measurement of the polarizabilities and field evaporation of individual tungsten atoms. J Chem Phys 54, 4205-4216.
40. TSONG, T.T. (1978). Field ion image formation. Surf Sci 70, 211-233.
41. TSONG, T.T. (1990). Atom-Probe Field Ion Microscopy. Cambridge, UK: Cambridge University Press.
42. TSONG, T.T., MCLANE, S.B. & KINKUS, T.J. (1982). Pulsed-laser time-of-flight atom-probe field ion microscope. Rev Sci Instrum 53, 1442-1448.
43. VURPILLOT, F., BOSTEL, A. & BLAVETTE, D. (1999). The shape of field emitters and the ion trajectories in three-dimensional atom probes. J Microsc 196, 332-336.
44. VURPILLOT, F., DA COSTA, G., MENAND, A. & BLAVETTE, D. (2001). Structural analyses in three dimensional atom probe: A Fourier transform approach. J Microsc 203, 295-302.
45. WAUGH, A.R., BOYES, E.D. & SOUTHON, M.J. (1976). Investigations of field evaporation with a field-desorption microscope. Surf Sci 61, 109-142.
46. WAUGH, A.R. & SOUTHON, M.J. (1977). Surface studies with an imaging atom-probe. Surf Sci 68, 79-85.
47. WILKES, T.J., SMITH, G.D.W. & SMITH, D.A. (1974). On the quantitative analysis of field-ion micrographs. Metallography 7, 403-430.