Atom probe tomography of Ni silicides: First stages of reaction and redistribution of Pt

Microelectronic Engineering

Volumn 85, Issue 10, 2008, Pages 1995-1999

  Mangelinck, D ^a   Hoummada, K ^a   Cojocaru Miredin O ^b   Cadel, E ^b   Perrin Pellegrino, C ^a   Blavette, D ^b  

^a AIX MARSEILLE UNIVERSITÉ   (France)

^b Université de Rouen   (France)

Author keywords

Atom probe field ion microscopy; Interface migration; Interface segregation; Thin films; Transition metal silicides

Indexed keywords

ATOM LASERS; ATOMS; BINARY ALLOYS; DEPOSITION; HEAT TREATMENT; INTERFACES (MATERIALS); LASER PULSES; NICKEL; PROBES; SEGREGATION (METALLOGRAPHY); SILICIDES; THIN FILMS; TRANSITION METAL COMPOUNDS;

AFTER-HEAT TREATMENT; ATOM PROBE FIELD-ION MICROSCOPIES; ATOM PROBE TOMOGRAPHY; CONSTANT THICKNESS; INTERFACE MIGRATION; INTERFACE SEGREGATION; INTERFACIAL SEGREGATION; TRANSITION METAL SILICIDES;

PLATINUM;

EID: 52349113446     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2008.04.048     Document Type: Article

References (40)

1. d'Heurle F.M., and Gas P. J. Mater. Res. 1 (1986) 205-221
2. d'Heurle F.M. J. Mater. Res. 3 (1988) 167
3. Mangelinck D., Dai J.Y., Pan J., and Lahiri S.K. Appl. Phys. Lett. 75 (1999) 1736
4. Lee P.S., Pey K.L., Mangelinck D., Ding J., Wee A.S.T., and Chan L. IEEE Electron Dev. Lett. 22 (2001) 568
5. Lavoie C., Detavernier Jr. C., Cabral C., d'Heurle F.M., Kellock A.J., Jordan-Sweet J., and Harper J.M.E. Microelectron. Eng. 83 (2006) 2042
6. Blavette D., Bostel A., Sarrau J.M., Deconihout B., and Menand A. Nature 363 (1993) 432
7. Vovk V., Schmitz G., and Kirchheim R. Phys. Rev. B 69 (2004) 104102
8. M.K. Miller, A. Cerezo, M.G. Hetherington, G.D.W. Smith, Atom Probe Field Ion Microscopy, Oxford, 2005.
9. Deconihout B., Vurpillot F., Gault B., Da costa G., Bouet M., Bostel A., Hideur A., Martel G., Brunel M., and Blavette D. Surf. Interf. Anal. 39 (2007)
10. Gault B., Vurpillot F., Gilbert M., Vella A., Menand A., Blavette D., and Deconihout B. Rev. Sci. Instrum. 77 (2006) 043705
11. Thompson K., Bunton J.H., Kelly T.F., and Larson D.J. Appl. Phys. Lett. 87 (2005) 052108
12. Larson D.J. Thin Solid Film 505 (2006) 16
13. Thompson K., Bunton J.H., Kelly Th., and Larson D.J. J. Vac. Sci. Technol., B 24 (2006) 421
14. Hoummada K., Cadel E., Mangelinck D., Perrin C., Deconihout B., and Blavette D. Appl. Phys. Lett. 89 (2006) 181905
15. Larson D.J., Foord D.T., Petford-Long A.K., Liew H., Blamire M.G., Cerezo A., and Smith G.D.W. Ultramicroscopy 79 (1999) 287
16. Vella A., Vurpillot F., Gault B., Menand A., and Deconihout B. Phys. Rev. B 73 (2006) 165416
17. Clevenger L.A., and Thompson C.V. J. Appl. Phys. 67 (1990) 1325
18. Gösele U., and Tu K.N. J. Appl. Phys. 66 (1989) 2621
19. Vurpillot F., Gault B., Vella A., Menand A., and Deconihout B. Appl. Phys. Lett. 88 (2006) 094105
20. Christian J.W. The Theory of Phase Transformations in Metals and Alloys (1965), Pergamon Press, Oxford
21. Soisson F., and Martin G. Phys. Rev. B 62 (2000) 203
22. Gusak A.M. Ukr. Phys. J. 35 (1990) 725
23. Desré P.J., and Yavari R. Phys. Rev. Lett. 64 (1990) 1533
24. Stull R., and Sinke G.C. Thermodynamic Properties of the Elements (1956), American Chemical Society, Washington, DC
25. Klinger L., Brechet Y., and Purdy G. Acta Mater. 46 (1998) 2617
26. Lusenko G., and Gusak A. Microelectron. Eng. 70 (2003) 529
27. Zimmermann H., and Ryssel H. Appl. Phys. A 55 (1992) 121
28. Istratov A.A., Zhang P., McDonald R.J., Smith A.R., Seacrist M., Moreland J., Shen J., Wahlich R., and Weber E.R. J. Appl. Phys. 97 (2005) 023505
29. Wittmer M., Ting C.Y., Ohdomari I., and Tu K.N. J. Appl. Phys. 53 (1982) 6781
30. Corni F., Grignaffini Gregorio B., Ottaviani G., Queirolo G., and Follegot J.P. Appl. Surf. Sci. 73 (1993) 197
31. Lee P.S., Pey K.L., Mangelinck D., Ding J., and Chan L. Solid State Commun. 128 9-10 (2003) 325-328
32. Finstad T.J., Mayer J.W., and Nicolet M.-A. Thin Solid Films 51 (1978) 391
33. Gösele U., and Tu K.N. J. Appl. Phys. 51 (1982) 3252
34. Gas P., and d'Heurle F.M. Appl. Surf. Sci. 73 (1993) 153
35. Ma E., Meng W.J., Johnson W.L., and Nicolet M.-A. Appl. Phys. Lett. 53 (1988) 2033
36. Mangelinck D., Gas P., Grob A., Pichaud B., and Thomas O. J. Appl. Phys. 79 (1996) 4078
37. Zhang L., and Ivey D.G. J. Mater. Res. 6 (1991) 1518
38. Nava F., Valeri S., Majini G., Cembali A., Pignatel G., and Queirolo G. J. Appl. Phys. 52 (1981) 6641
39. G. Ottaviani, J.W. Mayer, in: M.J. Howes, D.V. Morgan (Eds.), Reliability and Degradation Semiconductor Devices and Circuit.
40. Lien C.D., and Nicolet M.-A. Mater. Res. Soc. Symp. Proc. 25 (1984) 131