Defect engineering and micromachining of Lithium Niobate by ion implantation

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 267, Issue 17, 2009, Pages 2839-2845

  Bianconi, M ^a   Bentini, G G ^a   Chiarini, M ^b   De Nicola, P ^a   Montanari, G B ^a,c   Nubile, A ^a   Sugliani, S ^a  

^a CNR   (Italy)

^b Carlo Gavazzi Space SpA   (Italy)

^c UNIVERSITY OF BOLOGNA   (Italy)

Author keywords

Defect engineering; Ion implantation; Lithium Niobate; Micromachining

Indexed keywords

ATOMIC NUMBERS; CHEMICAL ETCHING; DAMAGE FORMATION; DEFECT ENGINEERING; ELECTRONIC PROCESS; ETCHING RATE; LITHIUM NIOBATE; ROOM TEMPERATURE; SEMIEMPIRICAL EQUATION; SUBTHRESHOLD; TEST PROCESS;

ATOMS; COMPOSITE MICROMECHANICS; DEFECTS; ETCHING; ION BOMBARDMENT; LITHIUM; MICROMACHINING; NIOBIUM COMPOUNDS;

ION IMPLANTATION;

EID: 68949137023     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2009.06.105     Document Type: Article

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