Damage effects produced in the near-surface region of x-cut LiNbO 3 by low dose, high energy implantation of nitrogen, oxygen, and fluorine ions

Journal of Applied Physics

Volumn 96, Issue 1, 2004, Pages 242-247

  Bentini, G G ^a   Bianconi, M ^a   Correra, L ^a   Chiarini, M ^b   Mazzoldi, P ^c   Sada, C ^c   Argiolas, N ^c   Bazzan, M ^c   Guzzi, R ^d  

^a CNR   (Italy)

^b Carlo Gavazzi Space SpA   (Italy)

^c UNIVERSITY OF PADOVA   (Italy)

^d INSTITUTE OF ATMOSPHERIC SCIENCES AND CLIMATE   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; DIFFUSION; DISLOCATIONS (CRYSTALS); FLUORINE; INTEGRATED OPTICS; ION IMPLANTATION; LITHIUM NIOBATE; NITROGEN; NUCLEATION; POINT DEFECTS; REFRACTIVE INDEX; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SECONDARY ION MASS SPECTROMETRY;

DAMAGE KINETICS; ELECTRONIC ENERGY LOSSES; IMPLANTATION ENERGY; RADIATION DAMAGES;

SINGLE CRYSTALS;

EID: 3142668452     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1756219     Document Type: Article

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