Modification of the etching properties of x-cut Lithium Niobate by ion implantation

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 266, Issue 8, 2008, Pages 1238-1241

  Bianconi, M ^a,b   Bergamini, F ^a,b   Bentini, G G ^a,b   Cerutti, A ^a,b   Chiarini, M ^b,c   De Nicola, P ^a,b   Pennestri G ^b,c  

^a CNR   (Italy)

^b Laboratory MIST E R   (Italy)

^c Carlo Gavazzi Space SpA   (Italy)

Author keywords

Etching; Ion implantation; Lithium Niobate; RBS channeling

Indexed keywords

CONCENTRATION (PROCESS); ION IMPLANTATION; ORDER DISORDER TRANSITIONS; THERMAL EFFECTS; WET ETCHING;

ETCHING PROPERTIES; LITHIUM NIOBATE; LITHIUM NIOBATE CRYSTALS; ROOM TEMPERATURE;

LITHIUM COMPOUNDS;

EID: 43049169878     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2007.12.051     Document Type: Article

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