Heavy ion beam micromachining on LiNbO3

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 267, Issue 1, 2009, Pages 69-73

  Nesprias F ^a   Venturino, M ^a   Debray, M E ^a,b   Davidson, J ^a,c   Davidson, M ^a,c   Kreiner, A J ^a,b,c   Minsky, D ^a,b   Fischer, M ^a   Lamagna, A ^a,b  

^a DEPARTAMENTO DE FÍSICA   (Argentina)

^b UNIVERSIDAD NACIONAL DE SAN MARTÍN   (Argentina)

^c Facultad de Ciencias Naturales e Instituto M Lillo   (Argentina)

Author keywords

Direct write; Lithium niobate; Swift heavy ions; Wave guides

Indexed keywords

COMPOSITE MICROMECHANICS; ELECTRIC CONDUCTORS; ETCHING; GYRATORS; HEAVY IONS; HYDROFLUORIC ACID; ION BEAMS; LITHIUM; MACHINING; MICROMACHINING; NIOBIUM COMPOUNDS; OPTICAL FIBER FABRICATION; OPTICAL FIBERS; OPTICAL INSTRUMENTS; THREE DIMENSIONAL; WAVEGUIDES;

3D MICROMACHINING; ACID SOLUTIONS; BUENOS AIRES; CONTROL ELECTRODES; DIRECT WRITE; ETCHING RATES; HEAVY ION BEAM (HIB); HIGH ENERGIES; ION MICROBEAM; LATTICE DAMAGES; LITHIUM NIOBATE; LITHIUM NIOBATE (LN) CRYSTALS; ROOM-TEMPERATURE (RT); SWIFT HEAVY IONS;

IONS;

EID: 58549083110     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2008.10.083     Document Type: Article

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