Investigation of heavily damaged ion implanted Si by atomistic simulation of Rutherford backscattering channeling spectra

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 230, Issue 1-4, 2005, Pages 613-618

  Lulli, G ^a   Albertazzi, E ^a   Bianconi, M ^a   Satta, A ^a   Balboni, S ^b   Colombo, L ^c   Uguzzoni, A ^b  

^a CNR   (Italy)

^b UNIVERSITY OF BOLOGNA   (Italy)

^c UNIVERSITY OF CAGLIARI   (Italy)

Author keywords

Amorphization; Ion channeling; Monte Carlo simulation; Point defects

Indexed keywords

AMORPHIZATION; COMPUTER SIMULATION; CRYSTAL LATTICES; ION IMPLANTATION; MOLECULAR DYNAMICS; MONTE CARLO METHODS; POINT DEFECTS; RADIATION DAMAGE; RELAXATION PROCESSES; RUTHERFORD BACKSCATTERING SPECTROSCOPY;

ION CHANNELING; LATTICE RELAXATION; RUTHERFORD BACKSCATTERING CHANNELING (RBS-C);

SILICON;

EID: 14744301906     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2004.12.110     Document Type: Conference Paper

References (14)

1. L.C. Feldman, J. Mayer, and S.T. Picraux Material Analysis by Ion Channeling 1982 Academic Press New York
2. E. Bøgh Can. J. Phys. 46 1968 653
3. K. Gärtner, K. Hehl, and G. Schlotzhauer Nucl. Instr. and Meth. B 4 1984 55
4. E. Albertazzi, M. Bianconi, G. Lulli, R. Nipoti, and M. Cantiano Nucl. Instr. and Meth. B 118 1996 128
5. S. Balboni, E. Albertazzi, M. Bianconi, and G. Lulli Phys. Rev. B 66 2002 045202
6. M. Bianconi, E. Albertazzi, S. Balboni, and G. Lulli Nucl. Instr. and Meth. B 219-220 2004 232
7. G. Lulli, E. Albertazzi, M. Bianconi, A. Satta, S. Balboni, and L. Colombo Phys. Rev. B 69 2004 165216
8. G. Lulli, E. Albertazzi, M. Bianconi, G.G. Bentini, and R. Lotti Nucl. Instr. and Meth. B 170 2000 1
9. M.Z. Bazant, E. Kaxiras, and J.F. Justo Phys. Rev. B 58 1997 2539
10. J.F. Justo, M.Z. Bazant, E. Kaxiras, V.V. Bulatov, and S. Yip Phys. Rev. B 56 1998 8542
11. M. Bianconi, E. Albertazzi, S. Balboni, L. Colombo, G. Lulli, A. Satta, Nucl. Instr. and Meth. B, these Proceedings. doi:10.1016/j.nimb.2004.12.038
12. P. Sigmund Appl. Phys. Lett. 14 1969 114
13. B. Weber, E. Wendler, K. Gärtner, D.M. Stock, and W. Wesch Nucl. Instr. and Meth. B 118 1996 113
14. L. Sealy, R.C. Barklie, G. Lulli, R. Nipoti, R. Balboni, S. Milita, and M. Servidori Nucl. Instr. and Meth. B 96 1995 215