Origin of highly spatially selective etching in deeply implanted complex oxides

Applied Physics Letters

Volumn 93, Issue 18, 2008, Pages

  Ofan, Avishai ^a   Gaathon, Ophir ^a   Vanamurthy, Lakshmanan ^b   Bakhru, Sasha ^b   Bakhru, Hassaram ^b   Evans Lutterodt, Kenneth ^c   Osgood, Richard M ^a  

^a Och Spine at New York Presbyterian Hospitals   (United States)

^b STATE UNIVERSITY OF NEW YORK   (United States)

^c BROOKHAVEN NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; HELIUM; OPTICAL MICROSCOPY;

COMPLEX OXIDES; FLUENCE; IMPLANTED REGIONS; PROBE MICROSCOPIES; RATE ENHANCEMENTS; SELECTIVE ETCHINGS; TEMPERATURE ANNEAL; TIME-RESOLVED; X-RAY DIFFRACTIONS;

ANNEALING;

EID: 55849142602     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3013821     Document Type: Article

References (22)

1. A. M. Radojevic, M. Levy, R. M. Osgood, Jr., A. Kumar, H. Bakhru, C. Tian, and C. Evans, Appl. Phys. Lett. 74, 3197 (1999).
2. T. Izuhara, R. M. Osgood, Jr., M. Levy, M. E. Reeves, Y. G. Wang, A. N. Roy, and H. Bakhru, Appl. Phys. Lett. 80, 1046 (2002).
3. T. A. Ramadan, M. Levy, and R. M. Osgood, Jr., Appl. Phys. Lett. 76, 1407 (2000).
4. A. M. Radojevic, M. Levy, H. Kwak, and R. M. Osgood, Jr., Appl. Phys. Lett. 75, 2888 (1999).
5. P. Olivero, S. Rubanov, P. Reichart, B. C. Gibson, S. T. Huntington, J. R. Rabeau, A. D. Greentree, J. Salzman, D. Moore, D. N. Jamieson, and S. Prawer, Diamond Relat. Mater. 15, 1614 (2006).
6. D. Djukic, R. M. Roth, J. T. Yardley, R. M. Osgood, Jr., S. Bakhru, and H. Bakhru, Opt. Express 12, 6159 (2004).
7. T. Izuhara, R. M. Roth, R. M. Osgood, Jr., S. Bakhru, and H. Bakhru, Electron. Lett. 39, 1118 (2003).
8. Y. B. Park, B. Min, K. J. Vahala, and H. A. Atwater, Adv. Mater. (Weinheim, Ger.) 18, 1533 (2006).
9. A. Guarino, G. Poberaj, D. Rezzonico, R. Degl'Innocenti, and P. Günter, Nat. Photonics 1, 407 (2007).
10. See: http://www.srim.org/SRIM/SRIM2006.htm
11. I. E. Barry, G. W. Ross, P. G. R. Smith, R. W. Eason, and G. Cook, Mater. Lett. 37, 246 (1998).
12. M. Bianconi, F. Bergamini, G. G. Bentini, A. Cerutti, M. Chiarini, P. De Nicola, and G. Pennestr, Nucl. Instrum. Methods Phys. Res. B 266, 1238 (2008).
13. T. Izuhara, R. M. Osgood, Jr., M. Levy, M. E. Reeves, Y. G. Wang, A. N. Roy, and H. Bakhru, Appl. Phys. Lett. 80, 1046 (2002).
14. R. W. Revie, Prog. Surf. Sci. 14, 53 (1983).
15. E. I. Meletis and R. F. Hochman, Corros. Sci. 26, 63 (1986).
16. K. Sieradzki and R. C. Newman, J. Phys. Chem. Solids 48, 1101 (1987).
17. R. M. Roth, D. Djukic, Y. S. Lee, R. M. Osgood, Jr., S. Bakhru, B. Laulicht, K. Dunn, H. Bakhru, L. Wu, and M. Huang, Appl. Phys. Lett. 89, 112906 (2006).
18. See EPAPS Document No. E-APPLAB-93-090844 for time-lapse movies. For more information on EPAPs, see http://www.aip.org/pubservs/epaps.html.
19. J. P. Scott, A. J. Boyland, S. Mailis, C. Grivas, O. Wagner, S. Lagoutte, and R. W. Eason, Appl. Surf. Sci. 230, 138 (2004).
20. C. E. Validivia, C. L. Sons, J. G. Scott, S. Mailis, R. W. Eason, D. A. Scrymgeour, V. Gopalan, T. Jungk, E. Soergel, and I. Clark, Appl. Phys. Lett. 86, 022906 (2005).
21. V. Ya. Shur, D. K. Kuznetsov, A. I. Lobov, E. V. Nikolaeva, M. A. Dolbilov, A. N. Orlov, and V. V. Osipov, Ferroelectrics 341, 85 (2006).
22. A. M. Prokhorov and Yu. S. Kuz'minov, Physics and Chemistry of Crystallione Lithium Niobate (Anadm Hilger, Bristol, 1990), p. 100.