Ridged LiNbO3 modulators fabricated by a novel oxygen-ion implant/wet-etch technique

Journal of Lightwave Technology

Volumn 22, Issue 3, 2004, Pages 887-894

  Gill, D M ^a   Jacobson, D ^a   White, C A ^a   Jones, C D W ^b   Shi, Y ^b   Minford, W J ^b   Harris, A ^b  

^a LUCENT TECHNOLOGIES   (United States)

^b AGERE SYSTEMS   (United States)

Author keywords

Electroopic modulation (EOM); Etching; Ferroelectric devices; High frequency (HF) transmitters; Ion implantation; Lithium niobate (LiNbO3); Materials processing; Optical device fabrication; Optical modulation; Ridge waveguides

Indexed keywords

BANDWIDTH; ELECTRODES; FERROELECTRIC DEVICES; LIGHT MODULATION; OPTICAL FIBER FABRICATION; OPTICAL WAVEGUIDES; PERMITTIVITY; REACTIVE ION ETCHING;

ELECTROOPTIC MODULATION; HIGH-FREQUENCY TRANSMITTERS; OPTICAL DEVICE FABRICATION; RIDGE WAVEGUIDES;

LIGHT MODULATORS;

EID: 2142670684     PISSN: 07338724     EISSN: None     Source Type: Journal    
DOI: 10.1109/JLT.2004.825764     Document Type: Article

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