Etching of ion irradiated LiNbO3 in aqueous hydrofluoric solutions

Journal of the Electrochemical Society

Volumn 155, Issue 4, 2008, Pages

  Reinisch, Jakob ^a   Schrempel, Frank ^a   Gischkat, Thomas ^a   Wesch, Werner ^a  

^a FRIEDRICH SCHILLER UNIVERSITY JENA   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; HYDROFLUORIC ACID; ION BOMBARDMENT; REACTION KINETICS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SINGLE CRYSTALS;

ACID TEMPERATURES; DAMAGE FORMATION; ETCHING RATE;

LITHIUM COMPOUNDS;

EID: 40549085410     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.2840567     Document Type: Article

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