Effect of low dose high energy O3+ implantation on refractive index and linear electro-optic properties in X-cut LiNbO3: Planar optical waveguide formation and characterization

Journal of Applied Physics

Volumn 92, Issue 11, 2002, Pages 6477-6483

  Bentini, G G ^a   Bianconi, M ^a   Chiarini, M ^a   Correra, L ^a   Sada, C ^b   Mazzoldi, P ^b   Argiolas, N ^b   Bazzan, M ^b   Guzzi, R ^c  

^a CNR   (Italy)

^b INFM   (Italy)

^c INSTITUTE OF ATMOSPHERIC SCIENCES AND CLIMATE   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROOPTICAL EFFECTS; ION IMPLANTATION; LITHIUM NIOBATE; OPTICAL WAVEGUIDES; RADIATION DAMAGE; REFRACTIVE INDEX; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SECONDARY ION MASS SPECTROMETRY;

ELECTRONIC STOPPING;

OPTICAL MATERIALS;

EID: 0036902046     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1516843     Document Type: Article

References (19)

1. S.K. Korotky and R.C. Alferness, in Integrated Optical Circuits and Components, edited by L.D. Hutcheson (Dekker, New York, 1987), Chap. 6.
2. R.V. Schmidt and I.P. Kaminov, Appl. Phys. Lett. 25, 458 (1974).
3. K.K. Wong, Properties of Lithium Niobate (INSPEC, London, 1989), Chap. 8.
4. Yu.N. Korkishko and V.A. Fedorov, IEEE J. Sel. Top. Quantum Electron. 2, 187 (1996).
5. P.D. Townsend, Nucl. Instrum. Methods Phys. Res. B 65, 243 (1992).
6. P.D. Townsend, Vacuum 51, 301 (1998).
7. G.L. Destefanis, J.P. Gailliard, E.L. Ligeon, S. Valette, B.W. Farmery, and P.D. Townsend, J. Appl. Phys. 50, 7898 (1979).
8. G. Goetz, Radiat. Eff. 98, 189 (1986).
9. H. Hu, F. Lu, F. Cheng, B.-R. Shi, K.-M. Wang, and D.-Y. Shen, J. Appl. Phys. 89, 5224 (2001).
10. F. Chen, H. Hu, J.-H. Zhang, F. Lu, B.-R. Shi, K.-M. Wang, D.-Y. Shen, and C.-Q. Wang, Phys. Status Solidi A 187, 543 (2001).
11. U.B. Ramabadran and H.E. Jackson, J. Appl. Phys. 74, 1492 (1993).
12. J.L. Jackel, C.E. Rice, and J.J. Veselka, Appl. Phys. Lett. 41, 607 (1982).
13. E. Albertazzi, M. Bianconi, M. Cantiano, G. Lulli, and R. Nipoti, Nucl. Instrum. Methods Phys. Res. B 118, 128 (1996).
14. Ulrich and R. Torge, Appl. Opt. 12, 2901 (1973).
15. H. Hu, F. Lu, F. Chen, B.-R. Shi, K.-M. Wang, and D.-Y. Shen, Appl. Opt. 40, 3759 (2001).
16. P.W. Leech and M.C. Ridgway, J. Vac. Sci. Technol. A 17, 3358 (1999).
17. Ion Modification of Insulators, edited by E. Mazzoldi and G.W. Arnold (Elsevier, Amsterdam, 1987).
18. G.V. Vázquez and P.D. Townsend, Nucl. Instrum. Methods Phys. Res. B 191, 110 (2002).
19. Stopping and Ranges of Ions in Matter, edited by J.F. Ziegler et al. (Pergamon, New York, 1985).