Ion implantation of silicon at the nanometer scale

Journal of Applied Physics

Volumn 102, Issue 7, 2007, Pages

  Bianconi, Marco ^a   Bergamini, Fabio ^b   Cristiani, Stefano ^a   Lulli, Giorgio ^a  

^a CNR   (Italy)

^b Laboratory MIST E R   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHIZATION; COMPUTER SIMULATION; ETCHING; ION IMPLANTATION; MONTE CARLO METHODS; SOLUTIONS;

HOLE RADIUS; NANOMETER SCALE; SWIFT IONS;

SILICA;

EID: 35348880313     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2786098     Document Type: Article

References (25)

1. P. D. Townsend, Nucl. Instrum. Methods Phys. Res. B 65, 243 (1992).
2. P. D. Townsend, J. Phys. E 10, 197 (1977).
3. P. Hazdra, J. Vobecky, and K. Brand, Nucl. Instrum. Methods Phys. Res. B 186, 414 (2002).
4. P. Cova, R. Menozzi, M. Portesine, M. Bianconi, E. Gombia, and R. Mosca, Solid-State Electron. 49, 183 (2005).
5. J. F. Gibbons, E. O. Hecht, and T. Tsurushima, Appl. Phys. Lett. 15, 117 (1969).
6. M. Masahara, Y. X. Liu, S. Hosokawa, T. Matsukawa, K. Ishii, H. Tanoue, K. Sakamoto, T. Sekigawa, H. Yamauchi, S. Kanemaru, and E. Suzuki, IEEE Trans. Electron Devices 51, 2078 (2004).
7. P. Levy, M. Bianconi, and L. Correra, J. Electrochem. Soc. 145, 344 (1998).
8. M. Koh, T. Goto, A. Sugita, T. Tanii, T. Iida, T. Shinada, T. Matsukawa, and I. Ohdomari, Jpn. J. Appl. Phys., Part 1 40, 2837 (2001).
9. M. Toulemonde, C. Trautmann, E. Balanzat, K. Hjort, and A. Weidinger, Nucl. Instrum. Methods Phys. Res. B 216, 1 (2004).
10. N. Matsuura, T. W. Simpson, I. Mitchell, X. Y. Mei, P. Morales, and H. E. Ruda, Appl. Phys. Lett. 81, 4826 (2002).
11. L. E. Rehn, B. J. Kestel, P. M. Baldo, J. Hiller, A. W. McCormick, and R. C. Birtcher, Nucl. Instrum. Methods Phys. Res. B 206, 490 (2003).
12. A. Razpet, A. Johansson, G. Possnert, M. Skupińki, K. Hjort, and A. Hallen, J. Appl. Phys. 97, 044310 (2005).
13. M. L. Taylor, R. D. Franich, A. Alves, P. Reichart, D. N. Jamieson, and P. N. Johnston, Nucl. Instrum. Methods Phys. Res. B 249, 752 (2006).
14. F. Bergamini, M. Bianconi, and S. Cristiani, Nucl. Instrum. Methods Phys. Res. B 257, 593 (2007).
15. G. Lulli, E. Albertazzi, M. Bianconi, G. G. Bentini, R. Nipoti, and R. Lotti, Nucl. Instrum. Methods Phys. Res. B 170, 1 (2000).
16. E. Albertazzi, M. Bianconi, G. Lulli, R. Nipoti, A. Carnera, and C. Cellini, Nucl. Instrum. Methods Phys. Res. B 112, 152 (1996).
17. G. Lulli, M. Bianconi, R. Nipoti, E. Albertazzi, M. Cervera, A. Carnera, and C. Cellini, J. Appl. Phys. 82, 5958 (1997).
18. The executable of the one dimensional version of KING program (running on i386 linux platform) can be downloaded at http://lotto.bo.imm.cnr.it/research/ ionimpl/openking_pgae.html
19. K. Moriwaki, N. Masuda, H. Aritome, and S. Namba, Jpn. J. Appl. Phys. 19, 491 (1980).
20. K. Moriwaki, H. Aritome, and S. Namba, Jpn. J. Appl. Phys. 20, 1305 (1981).
21. G. Willeke and K. Kellermann, Semicond. Sci. Technol. 11, 415 (1996).
22. L. Liou, W. G. Spitzer, and S. Prussin, J. Electrochem. Soc. 131, 672 (1984).
23. K. N. Tu, S. I. Tan, and B. L. Crowder, Appl. Phys. Lett. 22, 274 (1973).
24. E. Albertazzi, M. Bianconi, G. Lulli, R. Nipoti, and M. Cantiano, Nucl. Instrum. Methods Phys. Res. B 118, 128 (1996).
25. G. Lulli, E. Albertazzi, M. Bianconi, R. Nipoti, M. Cervera, A. Carnera, and C. Cellini, J. Appl. Phys. 82, 5958 (1997).