Nuclear and electronic energy loss synergy in the process of damage growth in ion implanted LiNbO3

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 249, Issue 1-2 SPEC. ISS., 2006, Pages 122-125

  Bianconi, M ^a   Argiolas, N ^b   Bazzan, M ^b   Bentini, G G ^a   Chiarini, M ^c   Cerutti, A ^a   Mazzoldi, P ^b   Pennestri G ^c   Sada, C ^b  

^a CNR   (Italy)

^b UNIVERSITY OF PADOVA   (Italy)

^c Carlo Gavazzi Space SpA   (Italy)

Author keywords

Ion implantation; Lithium niobate; RBS channeling

Indexed keywords

CARBON; ELECTRIC EXCITATION; ELECTRONICS ENGINEERING; ENERGY DISSIPATION; LITHIUM NIOBATE; POSITIVE IONS; SURFACE REACTIONS;

DISORDERED CLUSTERS; ELECTRONIC DAMAGE; FLUENCE; RBS CHANNELING;

ION IMPLANTATION;

EID: 33745823155     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2006.03.095     Document Type: Article

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