Low loss HF band SOI wine glass bulk mode capacitive square-plate resonator

Journal of Micromechanics and Microengineering

Volumn 19, Issue 7, 2009, Pages

  Lee, Joshua E Y ^a   Yan, Jize ^a   Seshia, Ashwin A ^a  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

BULK-MODE; DC BIAS VOLTAGE; ELECTRICAL CHARACTERIZATION; FUNDAMENTAL MODES; HIGH QUALITY FACTORS; LOW LOSS; MECHANICAL MATERIALS; MICRO RESONATORS; MICRO-MECHANICAL; MOTIONAL RESISTANCE; PLATE RESONATORS; QUALITY FACTORS; QUARTZ CRYSTAL RESONATOR; RESONANT FREQUENCIES; RESONANT MODE; SINGLE CRYSTAL SILICON; ULTRA-HIGH;

BANDPASS FILTERS; CRYSTAL RESONATORS; ELECTRIC POTENTIAL; GLASS; NATURAL FREQUENCIES; OXIDE MINERALS; Q FACTOR MEASUREMENT; QUARTZ; SINGLE CRYSTALS; WINE;

SILICON WAFERS;

EID: 67849104761     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/19/7/074003     Document Type: Article

References (27)

1. Nguyen C T-C 2007 MEMS technology for timing and frequency control IEEE Trans. Ultrason. Ferroelectr. Freq. Control 54 251-70
2. Esashi M 1996 Resonant sensors by silicon micromachining Proc. IEEE International Frequency Control Symposium (Honolulu, HI) 609-14
3. Srikar V T and Senturia S D 2002 Thermoelastic damping in fine-grained polysilicon flexural beam resonators IEEE J. Microelectromech. Syst. 11 499-504
4. Kaajakari V, Kiihamäkia J, Ojaa A, Pietikäinenb S, Kokkalab V and Kuisma H 2006 Stability of wafer-level vacuum encapsulated silicon crystal silicon resonators Sensors Actuators A 130-31 42-47
5. Kim B, Candler R, Hopcroft M, Agarwal M, Park W-T and Kenny T 2005 Frequency stability of wafer scale vacuum encapsulated MEMS resonators Proc. 13th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (Seoul, Korea) 1965-8
6. Hopcroft M A 2007 Temperature-stabilized silicon resonators for frequency references PhD Dissertation Stanford University, Stanford, CA
7. Sundaresan K, Ho G K, Pourkamali S and Ayazi F 2007 Electronically temperature compensated silicon bulk acoustic resonator reference oscillators IEEE J. Solid-State Circuits 42 1425-34
8. Salvia J, Messana M, Ohline M, Hopcroft M A, Melamud R, Chandorkar S, Lee H K, Bahl G, Murmann B and Kenny T W 2008 Exploring the limits and practicality of Q-based temperature compensation for silicon resonators Proc. IEDM Tech. Digest (San Francisco, CA) 671-4
9. Leeson D B 1966 A simple model of feedback oscillator noise spectrum Proc. IEEE 54 329-30
10. Razavi B 1996 A study of phase noise in CMOS oscillators IEEE J. Solid-State Circuits 31 331-43
11. Lifshitz R 2002 Phonon-mediated dissipation in micro- and nano-mechanical systems Physica B 316-7 397-9
12. Chandorkar S A, Agarwal M, Melamud R, Candler R N, Goodson K E and Kenny T W 2008 Limits of quality factor in bulk-mode micromechanical resonators Proc. 21st IEEE Micro Electro Mechanical Systems Conference (MEMS'08) (Tucson, AZ) pp 72-75
13. Pourkamali S, Hashimura A, Abdolvand R, Ho G K, Erbil A and Ayazi F 2003 High-Q single crystal silicon HARPSS capacitive beam resonators with sub-micron transduction gaps J. Microelectromech. Syst. 12 487-96
14. Lee J E-Y, Bahreyni B, Zhu Y and Seshia A A 2008 A single-crystal silicon bulk acoustic mode microresonator oscillator IEEE Electron Device Lett. 29 701-03
15. Pourkamali S, Hao Z and Ayazi F 2004 VHF single crystal silicon capacitive elliptic bulk-mode disk resonators- Part II. Implementation and characterization J. Microelectromech. Syst. 13 1054-62 (Pubitemid 40009506)
16. Wang J, Butler J E, Feygelson T and Nguyen C T-C 2004 1.51-GHz polydiamond micromechanical disk resonator with impedance-mismatched isolating support Proc. 17th IEEE Micro Electro Mechanical Systems Conference (MEMS'04) (Maastricht, The Netherlands) pp 641-4
17. Palaniapan M and Khine L 2007 Micromechanical resonator with ultra-high quality factor Electron. Lett. 43 1090-2
18. Hao Z and Ayazi F 2005 Support loss in micromechanical disk resonators Proc. of 18th IEEE Micro Electro Mechanical Systems Conference (MEMS'05) (Miami, FL) 137-41
19. Weinstein D and Bhave S A 2007 Internal dielectric transduction of a 4.5 GHz silicon bar resonator Proc. of IEEE International Electron Devices Meeting (IEDM 2007) (Washington, DC) pp 415-8
20. Weinstein D and Bhave S A 2008 Piezoresistive sensing of a dielectrically actuated silicon bar resonator Proc. of 2008 Solid State Sensor, Actuator and Microsystems Workshop (Hilton Head Island, SC) 368-71
21. Lee J E-Y, Zhu Y and Seshia A A 2008 Bulk acoustic mode single-crystal silicon microresonator with high quality factor J. Micromech. Microeng. 18 064001
22. Basrour S, Majjad H, Coudevylle J R and de Labachèlerie M 2001 Simulation and characterization of high Q microresonators fabricated by UV-LIGA Proc. Int. Conf. on Modeling and Simulation of Microsystems (MSM'01) 294-7
23. Wortman J J and Evans R A 1965 Youngs' modulus, shear modulus and Poisson's ratio in silicon and germanium J. Appl. Phys. 36 153-6
24. Yan J 2007 Micro/nano-electro-mechanical resonators for signal processing PhD Thesis Cambridge University
25. Lee J E-Y, Yan J and Seshia A A 2008 Anchor limited Q in flexural mode resonators Proc. IEEE Ultrasonics Symposium (Beijing, China)
26. Khine L, Palaniapan M and Tan W K 2007 6 MHz bulk mode resonator with Q values exceeding one million Proc. 14th Int. Conf. on Solid State Sensors, Actuators, and Microsystems (Transducers'07) (Lyon, France) pp 2445-8
27. Watanabe F and Watanabe T 2002 Convex quartz crystal resonator of extremely high Q in 10 MHz-50 MHz Proc. 2002 IEEE Ultrasonics Symposium (Munich, Germany) pp 1007-10