|
|
Volumn 316-317, Issue , 2002, Pages 397-399
|
|
Phonon-mediated dissipation in micro- and nano-mechanical systems
a
|
|
Author keywords
Dissipation; MEMS; Nanostructures; NEMS; Phonons; Quality factor; Resonators
|
|
Indexed keywords
ASPECT RATIO;
DAMPING;
ENERGY DISSIPATION;
NANOSTRUCTURED MATERIALS;
NANOTECHNOLOGY;
PHONONS;
Q FACTOR MEASUREMENT;
RESONATORS;
THERMOELASTICITY;
TORSIONAL STRESS;
MICRO-ELECTROMECHANICAL SYSTEMS (MEMS);
MICROELECTROMECHANICAL DEVICES;
|
|
EID: 0036567514
PISSN: 09214526
EISSN: None
Source Type: Journal
DOI: 10.1016/S0921-4526(02)00524-0 Document Type: Conference Paper |
|
Times cited : (28)
|
|
References (14)
|
