Low temperature deposition of titanium oxide containing thin films in trench features from titanium diisopropoxide bis(dipivaloylmethanate) in supercritical CO2

Journal of Supercritical Fluids

Volumn 50, Issue 3, 2009, Pages 313-319

  Kano, Fuyuki ^a   Uchida, Hiroshi ^a   Koda, Seiichiro ^a  

^a SOPHIA UNIVERSITY   (Japan)

Author keywords

scCO2; Step coverage; Supercritical fluid deposition; TiO2; Titanium diisopropoxide bis(dipivaloylmethanate)

Indexed keywords

CONFORMAL FILLING; CONFORMAL FILMS; DEPOSITED FILMS; FLUID DENSITIES; FLUID TEMPERATURES; LOW TEMPERATURES; LOW-TEMPERATURE DEPOSITION; SCCO2; SI SUBSTRATES; STEP COVERAGE; SUBSTRATE SURFACE; SUBSTRATE TEMPERATURE; SUPERCRITICAL CARBON DIOXIDE FLUIDS; SUPERCRITICAL CO; SUPERCRITICAL FLUID DEPOSITION; TIO; TIO2; XPS SPECTRA; XRD SPECTRA;

CARBON DIOXIDE; EFFLUENT TREATMENT; OXIDE FILMS; SUBSTRATES; SUPERCRITICAL FLUID EXTRACTION; SUPERCRITICAL FLUIDS; TITANIUM; TITANIUM DIOXIDE; TITANIUM OXIDES;

DEPOSITION;

EID: 67749120554     PISSN: 08968446     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.supflu.2009.06.008     Document Type: Article

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