Thermal decomposition of Ti (O-iPr)2(dpm)2 on a silicon surface analyzed by TPD and XPS

Journal of the Electrochemical Society

Volumn 153, Issue 7, 2006, Pages

  Cho, Yong Seok ^a   Heo, Jung Shik ^a   Kim, Jeong Chan ^a   Moon, Sang Heup ^a  

^a Seoul National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ACETONE; DISSOCIATION; PLATINUM; PROPYLENE; PYROLYSIS; SURFACE TREATMENT; TEMPERATURE PROGRAMMED DESORPTION; TITANIUM COMPOUNDS; X RAY PHOTOELECTRON SPECTROSCOPY;

ISOPROPANOL; LIGANDS; PRECURSORS;

SILICON;

EID: 33744908561     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.2199439     Document Type: Article

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