Deposition of yttrium oxide thin films in supercritical carbon dioxide

Thin Solid Films

Volumn 516, Issue 18, 2008, Pages 6197-6204

  Gougousi, Theodosia ^a   Chen, Zhiying ^a  

^a UNIVERSITY OF MARYLAND BALTIMORE COUNTY   (United States)

Author keywords

81.05.Je; 81.10.Dn; 81.20. n; Deposition process; Supercritical carbon dioxide; Yttrium oxide

Indexed keywords

CARBON DIOXIDE; DEPOSITION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; SPECTROSCOPIC ELLIPSOMETRY; X RAY PHOTOELECTRON SPECTROSCOPY; YTTRIUM OXIDE;

HOT WALL REACTOR; ORGANIC (TERT-BUTYL AND DI-TERT-AMYL) PEROXIDES; SUPERCRITICAL CARBON DIOXIDE;

THIN FILMS;

EID: 44649111796     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.11.104     Document Type: Article

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