SCOPUS 정보 검색 플랫폼

Applied Physics Letters

Volumn 88, Issue 9, 2006, Pages

Supercritical-carbon dioxide-assisted cyclic deposition of metal oxide and metal thin films

(4) Barua, Dipak a Gougousi, Theodosia a,b Young, Erin D a,c Parsons, Gregory N a

a NORTH CAROLINA STATE UNIVERSITY (United States)

b UNIVERSITY OF MARYLAND BALTIMORE COUNTY (United States)

c INTEL CORPORATION (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FILM THICKNESS INCREASED LINEARLY; METAL OXIDE AND METAL THIN FILMS; PRECURSORS INCLUDED AL(HFAC) 3, AL(ACAC) 3, AND PD(HFAC) 2, AND AQUEOUS H2 O2, TERT-BUTYL PERACETATE; SUPERCRITICAL;

ADSORPTION; ALUMINUM COMPOUNDS; CARBON DIOXIDE; HYDROGEN; METALLIC FILMS; OXIDATION; PALLADIUM; REDUCTION; THERMAL EFFECTS; THIN FILMS;

SUPERCRITICAL FLUIDS;

EID: 33644676728 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.2181651 Document Type: Article

Times cited : (12)

References (12)

1
- 0000028015
- J. J. Watkins, J. M. Blackburn, and T. J. McCarthy, Chem. Mater. 11, 213 (1999).
- (1999) Chem. Mater. , vol.11 , pp. 213
- Watkins, J.J.¹ Blackburn, J.M.² McCarthy, T.J.³

2
- 0035812811
- J. M. Blackburn, D. P. Long, A. Cabanas, and J. J. Watkins, Science 294, 141 (2001).
- (2001) Science , vol.294 , pp. 141
- Blackburn, J.M.¹ Long, D.P.² Cabanas, A.³ Watkins, J.J.⁴

3
- 6044274613
- H. Ohde, S. Kramer, S. Moore, and C. M. Wai, Chem. Mater. 16, 4028 (2004).
- (2004) Chem. Mater. , vol.16 , pp. 4028
- Ohde, H.¹ Kramer, S.² Moore, S.³ Wai, C.M.⁴

4
- 26944473154
- T. Gougousi, D. Barua, E. D. Young, and G. N. Parsons, Chem. Mater. 17, 5093 (2005).
- (2005) Chem. Mater. , vol.17 , pp. 5093
- Gougousi, T.¹ Barua, D.² Young, E.D.³ Parsons, G.N.⁴

5
- 0032682630
- M. Ritala and M. Leskela, Nanotechnology 10, 19 (1999).
- (1999) Nanotechnology , vol.10 , pp. 19
- Ritala, M.¹ Leskela, M.²

6
- 0003878064
- Butterworth-Heinemann, Boston
- M. McHugh and V. J. Krukonis, Supercritical Fluid Extraction (Butterworth-Heinemann, Boston, 1994).
- (1994) Supercritical Fluid Extraction
- McHugh, M.¹ Krukonis, V.J.²

7
- 0000081968
- T. M. Klein, D. Niu, W. S. Epling, W. Li, D. M. Maher, C. C. Hobbs, R. I. Hegde, I. J. R. Baumvol, and G. N. Parsons, Appl. Phys. Lett. 75, 4001 (1999).
- (1999) Appl. Phys. Lett. , vol.75 , pp. 4001
- Klein, T.M.¹ Niu, D.² Epling, W.S.³ Li, W.⁴ Maher, D.M.⁵ Hobbs, C.C.⁶ Hegde, R.I.⁷ Baumvol, I.J.R.⁸ Parsons, G.N.⁹

8
- 0000162605
- E. P. Gusev, M. Copel, E. Cartier, I. J. R. Baumvol, C. Krug, and M. A. Gribelyuk, Appl. Phys. Lett. 76, 176 (2000).
- (2000) Appl. Phys. Lett. , vol.76 , pp. 176
- Gusev, E.P.¹ Copel, M.² Cartier, E.³ Baumvol, I.J.R.⁴ Krug, C.⁵ Gribelyuk, M.A.⁶

9
- 0031015774
- N. G. Smart, T. Carleson, T. Kast, A. A. Clifford, M. D. Burford, and C. M. Wai, Talanta 44, 137 (1997).
- (1997) Talanta , vol.44 , pp. 137
- Smart, N.G.¹ Carleson, T.² Kast, T.³ Clifford, A.A.⁴ Burford, M.D.⁵ Wai, C.M.⁶

10
- 0030056176
- W. B. Lin, B. C. Wiegand, R. G. Nuzzo, and G. S. Girolami, J. Am. Chem. Soc. 118, 5977 (1996).
- (1996) J. Am. Chem. Soc. , vol.118 , pp. 5977
- Lin, W.B.¹ Wiegand, B.C.² Nuzzo, R.G.³ Girolami, G.S.⁴

11
- 10644241940
- J. J. Senkevich, F. Tang, D. Rogers, J. T. Drotar, C. Jezewski, W. A. Lanford, G. C. Wang, and T. M. Lu, Chem. Vap. Deposition 9, 258 (2003).
- (2003) Chem. Vap. Deposition , vol.9 , pp. 258
- Senkevich, J.J.¹ Tang, F.² Rogers, D.³ Drotar, J.T.⁴ Jezewski, C.⁵ Lanford, W.A.⁶ Wang, G.C.⁷ Lu, T.M.⁸

12
- 33644687277
- M. P. T. Bradley and D. A. Pantony, Talanta 16, 473 (1969).
- (1969) Talanta , vol.16 , pp. 473
- Bradley, M.P.T.¹ Pantony, D.A.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.