Metal oxide thin films deposited from metal organic precursors in supercritical CO 2 solutions

Chemistry of Materials

Volumn 17, Issue 20, 2005, Pages 5093-5100

  Gougousi, Theodosia ^a,b   Barua, Dipak ^a   Young, Erin D ^a,c   Parsons, Gregory N ^a  

^a North Carolina State University   (United States)

^b UNIVERSITY OF MARYLAND BALTIMORE COUNTY   (United States)

^c University of Virginia   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CYCLIC DEPOSITION; METAL ORGANIC PERCURSORS; METAL OXIDE THIN FILMS; SURFACE ADSORPTION;

CARBON DIOXIDE; DEPOSITION; MOS DEVICES; ORGANIC COMPOUNDS; SUPERCRITICAL FLUIDS; X RAY PHOTOELECTRON SPECTROSCOPY;

THIN FILMS;

EID: 26944473154     PISSN: 08974756     EISSN: None     Source Type: Journal    
DOI: 10.1021/cm0510965     Document Type: Article

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