Synthesis of oxide thin films on silicon substrate using supercritical carbon dioxide fluid

Key Engineering Materials

Volumn 320, Issue , 2006, Pages 91-94

  Kano, Fuyuki ^a   Uchida, Hiroshi ^a   Sugimoto, Kazuko ^a   Koda, Seiichiro ^a  

^a SOPHIA UNIVERSITY   (Japan)

Author keywords

Carbon dioxide; Silicon wafer; Supercritical fluid; Titanium oxide

Indexed keywords

CARBON DIOXIDE; CRYSTALLINE MATERIALS; SILICON; SILICON WAFERS; SUBSTRATES; SUPERCRITICAL FLUIDS; TITANIUM COMPOUNDS; TITANIUM OXIDES;

FLAT FILMS; OXIDE THIN FILMS; REACTION TEMPERATURE; TITANIUM DIISOPROPOXIDE;

THIN FILMS;

EID: 33748451658     PISSN: 10139826     EISSN: 16629795     Source Type: Book Series    
DOI: 10.4028/0-87849-411-1.91     Document Type: Conference Paper

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