The influence of processing gas on the mechanical properties of sputtered B-C-N-H films

Applied Surface Science

Volumn 255, Issue 20, 2009, Pages 8575-8581

  Chen, Youming ^a,b   Yang, Shengrong ^a   Zhang, Junyan ^a  

^a LANZHOU INSTITUTE OF CHEMICAL PHYSICS   (China)

^b INSTITUTE OF GEOLOGY AND GEOPHYSICS   (China)

Author keywords

Boron carbon nitride; Friction coefficient; Hardness; Microstructure; Residual stress

Indexed keywords

BONDING; FRICTION; HARDNESS; MECHANICAL PROPERTIES; MICROSTRUCTURE; RESIDUAL STRESSES; WEAR RESISTANCE;

BONDING CHARACTERISTICS; BORON CARBON NITRIDE; CARBONACEOUS COMPOUNDS; COEFFICIENT OF FRICTIONS; FRICTION COEFFICIENTS; MEDIUM-FREQUENCY MAGNETRON SPUTTERING; MICROSTRUCTURE AND MECHANICAL PROPERTIES; TRIBOLOGICAL PROPERTIES;

CARBON FILMS;

EID: 67650475780     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2009.06.024     Document Type: Article

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