Fabrication of amorphous boron-carbon-nitrogen films by hot-wire CVD

Journal of Non-Crystalline Solids

Volumn 338-340, Issue 1 SPEC. ISS., 2004, Pages 509-512

  Yokomichi, H ^a   Futakuchi, T ^b   Yasuoka, M ^c   Kishimoto, N ^d  

^a TOYAMA PREFECTURAL UNIVERSITY   (Japan)

^b TOYAMA INDUSTRIAL TECHNOLOGY CENTER   (Japan)

^c KANAZAWA UNIVERSITY   (Japan)

^d NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AMMONIA; BORON; CARBON; CHEMICAL VAPOR DEPOSITION; DECOMPOSITION; HYDROCHLORIC ACID; INFRARED SPECTROSCOPY; METALLIC FILMS; SCANNING ELECTRON MICROSCOPY; X RAY PHOTOELECTRON SPECTROSCOPY;

BOROB-CARBON-NITROGEN (BCN) FILMS; BORON NITRIDE; HOT-WIRE CHEMICAL VAPOR DEPOSITION (HWCVD); MICRO-VOIDS;

AMORPHOUS FILMS;

EID: 2942555215     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jnoncrysol.2004.03.030     Document Type: Conference Paper

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