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Modern Physics Letters B

Volumn 21, Issue 8, 2007, Pages 455-466

Structural and optical characterization of boron-nitrogen-doped amorphous carbon films deposited by r.f. PECVD

(4) Podder, J a Rusop, M b Soga, T b Jimbo, T b

a BANGLADESH UNIVERSITY OF ENGINEERING AND TECHNOLOGY (Bangladesh)

b NAGOYA INSTITUTE OF TECHNOLOGY (Japan)

Author keywords

a C:H:B:N films; Nitrogen and boron incorporation; Optical properties; PECVD

Indexed keywords

EID: 34247363630 PISSN: 02179849 EISSN: None Source Type: Journal
DOI: 10.1142/S0217984907012906 Document Type: Article

Times cited : (1)

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