Mechanical properties of amorphous boron carbon nitride films produced by dual gun sputtering

Diamond and Related Materials

Volumn 12, Issue 9, 2003, Pages 1463-1471

  Chien, S C ^a,b   Chattopadhyay, S ^a   Chen, L C ^a   Lin, S T ^b   Chen, K H ^c  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^b NATIONAL TAIWAN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

^c INSTITUTE OF ATOMIC AND MOLECULAR SCIENCES   (Taiwan)

Author keywords

Amorphous boron carbon nitride; Dual gun sputtering; FTIR; X ray photoelectron spectroscopy

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; BORON COMPOUNDS; CHEMICAL BONDS; DEPOSITION; ELASTIC MODULI; SPUTTERING; X RAY PHOTOELECTRON SPECTROSCOPY;

HYBRIDIZATION;

AMORPHOUS FILMS;

SPUTTERING;

EID: 0142247958     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(03)00175-4     Document Type: Article

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