Improvement in thermal stability of B-C-N thin films fabricated by magnetron sputtering using graphite and BN co-target

Vacuum

Volumn 80, Issue 7 SPEC. ISS., 2006, Pages 748-751

  Yokomichi, H ^a   Futakuchi, T ^b   Amekura, H ^c   Kishimoto, N ^c  

^a TOYAMA PREFECTURAL UNIVERSITY   (Japan)

^b TOYAMA INDUSTRIAL TECHNOLOGY CENTER   (Japan)

^c NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

Author keywords

B C N films; Sputtering; Thermal stability

Indexed keywords

BORON COMPOUNDS; GRAPHITE; MAGNETRON SPUTTERING; RAMAN SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; THERMODYNAMIC STABILITY; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

B-C-N FILMS; BORON-NITROGEN BONDS; INFRARED ABSORPTION SPECTROSCOPY;

AMORPHOUS FILMS;

EID: 33747418493     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2005.11.040     Document Type: Article

References (9)

1. Kouvetakis J, Kaner RB, Sattler ML, Martlett N. J Chem Soc Chem Commun 1986:1758.
2. Kaner R.B., Kouvetakis J., Warble C.E., Sattler M.L., and Bartlett N. Mater Res Bull 22 (1987) 399
3. Yu J.E., and Wang E.G. Appl Phys Lett 74 (1999) 2948
4. Tempez A., Badi N., Bensaoula A., and Kulik J. J Vac Sci Technol A16 (1998) 2896
5. Yokomichi H., Funakawa T., and Masuda A. Vacuum 66 (2002) 245
6. Yokomichi H., Futakuchi T., Yasuoka M., and Kishimoto N. J Non-Cryst Solids 338-340 (2004) 509
7. Yokomichi H., Sakima H., and Masuda A. Jpn J Appl Phys 37 (1998) 4722
8. Victoria N.M., Hammer P., dos Santos M.C., and Alvarez F. Phys Rev B 61 (2000) 1083
9. Laidani N., Andele M., Canteri R., Elia L., Luches A., Martino M., Micheli V., and Speranza G. Appl Surf Sci 157 (2000) 135