Characterization of carbon-boronnitride-coatings prepared with chemical vapor deposition by auger electron spectroscopy, electron probe microanalysis and secondary ion mass spectrometry

Thin Solid Films

Volumn 406, Issue 1-2, 2002, Pages 98-102

  Gammer, K ^a   Kolber, T ^a   Piplits, K ^a   Nowikow, K ^a   Tang, X ^a   Haubner, R ^a   Hutter, H ^a  

^a VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

Author keywords

Boron carbo nitride (BCN); Boron nitride; Coatings; Secondary ion mass spectrometry (SIMS); Selected area 'A: synthesis and characterization'; Surface structure

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; BORON COMPOUNDS; CARBON; CHEMICAL VAPOR DEPOSITION; MICROANALYSIS; SECONDARY ION MASS SPECTROMETRY; SUBSTRATES; SURFACE ROUGHNESS;

CARBON-BORONNITRIDE (BCN) COATINGS;

INORGANIC COATINGS;

EID: 0037051256     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(01)01790-4     Document Type: Article

References (15)