B–C–N coatings prepared by microwave chemical vapor deposition

Thin Solid Films

Volumn 398, Issue 399, 2001, Pages 270-274

  Stanishevsky, A ^a   Li, H ^a   Badzian, A ^b   Badzian, T ^b   Drawl, W ^b   Khriachtchev, L ^c   McDaniel, E ^d  

^a UNIVERSITY OF MARYLAND   (United States)

^b PENNSYLVANIA STATE UNIVERSITY   (United States)

^c UNIVERSITY OF HELSINKI   (Finland)

^d Microelectronics Research Laboratory   (United States)

Author keywords

Boron nitride; Chemical vapor deposition; Coatings; Diamond; Raman spectroscopy; Transmission electron microscopy

Indexed keywords

BORON COMPOUNDS; CHEMICAL VAPOR DEPOSITION; COATINGS; NANOSTRUCTURED MATERIALS; RAMAN SCATTERING; SUBSTRATES; TRANSMISSION ELECTRON MICROSCOPY;

MICROWAVE CHEMICAL VAPOR DEPOSITION;

TERNARY SYSTEMS;

EID: 0035506936     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(01)01389-X     Document Type: Article

References (21)