Characterization of PECVD boron carbonitride layers

Applied Surface Science

Volumn 252, Issue 1 SPEC. ISS., 2005, Pages 223-226

  Thamm, T ^a   Korner K U ^a   Bohne, W ^b   Strub, E ^b   Rohrich J ^b   Stockel S ^a   Marx, G ^a  

^a CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

^b HAHN MEITNER INSTITUT   (Germany)

Author keywords

BCN; ERDA; FTIR spectroscopy; Hardness; Hydrogen content; PECVD

Indexed keywords

CHARACTERIZATION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; INDENTATION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SUBSTRATES;

BCN FILMS; ERDA; HYDROGEN CONTENT;

CARBON NITRIDE;

EID: 24644499509     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2005.02.041     Document Type: Conference Paper

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