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Volumn 37, Issue 1, 2008, Pages 96-97

Hexagonal BCN films prepared by RF plasma-enhanced CVD

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EID: 38949172070 PISSN: 03667022 EISSN: None Source Type: Journal
DOI: 10.1246/cl.2008.96 Document Type: Article

Times cited : (14)

References (12)

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