Synthesis of BCN thin films by nitrogen ion beam assisted pulsed laser deposition from a B4C target

Diamond and Related Materials

Volumn 16, Issue 8, 2007, Pages 1579-1585

  Ying, Z F ^a   Yu, D ^a   Ling, H ^a   Xu, N ^a   Lu, Y F ^a   Sun, J ^a   Wu, J D ^a  

^a FUDAN UNIVERSITY   (China)

Author keywords

Boron carbon nitride thin film; Ion beam assisted deposition; Kaufman ion gun; Nitrogen ion beam; Reactive pulsed laser deposition

Indexed keywords

CRYSTAL STRUCTURE; FOURIER TRANSFORM INFRARED SPECTROSCOPY; ION BEAMS; SYNTHESIS (CHEMICAL); TRANSMISSION ELECTRON MICROSCOPY; X RAY PHOTOELECTRON SPECTROSCOPY;

ATOMIC HYBRIDIZATION; BONDING CONFIGURATION; LASER DEPOSITION; TARGET MATERIAL;

THIN FILMS;

EID: 34249084942     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2007.01.021     Document Type: Article

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