The deposition and characterization of BCN films by cathodic arc plasma evaporation

Surface and Coatings Technology

Volumn 201, Issue 9-11 SPEC. ISS., 2007, Pages 5108-5113

  Tsai, Pi Chuen ^a  

^a NATIONAL FORMOSA UNIVERSITY   (Taiwan)

Author keywords

BCN s; Boron carbon nitride; Cathodic arc plasma; Characterization; Microstructure; Thin films

Indexed keywords

DEPOSITION; EVAPORATION; HARDNESS; MICROSTRUCTURE; SURFACE ROUGHNESS; SYNTHESIS (CHEMICAL); THIN FILMS;

BONDING STRUCTURE; BORON CARBON NITRIDE; CATHODIC ARC PLASMA DEPOSITION;

BORON COMPOUNDS;

BORON COMPOUNDS; DEPOSITION; EVAPORATION; HARDNESS; MICROSTRUCTURE; SURFACE ROUGHNESS; SYNTHESIS (CHEMICAL); THIN FILMS;

EID: 33846522265     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2006.07.119     Document Type: Article

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